Schmidt, Mark A.

Lawrence Livermore National Laboratory

1 paper on CoChatORCID 0000-0002-0934-5393

Most cited papers

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Advances in multilayer reflective coatings for extreme ultraviolet lithography
Folta, J. A., Bajt, S., Barbee, Jr., Grabner, R. F., Mirkarimi, P. B., Nguyen, T. D., Schmidt, M. A., Spiller, E. A., Walton, C. C., Wedowski, M., et al. (1999) · SPIE Proceedings
Advancements in Photolithography TechniquesOptical Coatings and Gratings
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