Socha, Robert

ASML (United States)

1 paper on CoChatORCID 0000-0003-2388-1819

Most cited papers

Verified
Understanding illumination effects for control of optical proximity effects (OPE)
Flagello, D. G., Geh, B., Socha, R., Liu, P., Cao, Y., Stas, R., Natt, O., & Zimmermann, J. (2008) · SPIE Proceedings
Advancements in Photolithography TechniquesAdvanced optical system design
Cited by 11

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