Perez-Landeros, Oscar

Properties of Al2O3 Thin Films Grown by PE-ALD at Low Temperature Using H2O and O2 Plasma Oxidants

Castillo-Saenz, J., Nedev, N., Valdez-Salas, B., Curiel-Alvarez, M., Mendivil-Palma, M. I., Hernandez-Como, N., Martinez-Puente, M., Mateos, D., Perez-Landeros, O., & Martinez-Guerra, E. (2021) · Coatings

Semiconductor materials and devicesCopper Interconnects and Reliability

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