Fomenkov, Igor

EUV lithography performance for manufacturing: status and outlook

Pirati, A., Peeters, R., Smith, D., Lok, S., van Noordenburg, M., van Es, R., Verhoeven, E., Meijer, H., Minnaert, A., van der Horst, J.-W., et al. (2016) · SPIE Proceedings

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LPP source system development for HVM

Brandt, D. C., Fomenkov, I. V., Ershov, A. I., Partlo, W. N., Myers, D. W., Sandstrom, R. L., La Fontaine, B. M., Lercel, M. J., Bykanov, A. N., Böwering, N. R., et al. (2011) · SPIE Proceedings

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