Nguyen, Tai D.

Lawrence Livermore National Laboratory

1 paper on CoChatORCID 0000-0002-4139-9519

Most cited papers

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Advances in multilayer reflective coatings for extreme ultraviolet lithography
Folta, J. A., Bajt, S., Barbee, Jr., Grabner, R. F., Mirkarimi, P. B., Nguyen, T. D., Schmidt, M. A., Spiller, E. A., Walton, C. C., Wedowski, M., et al. (1999) · SPIE Proceedings
Advancements in Photolithography TechniquesOptical Coatings and Gratings
Cited by 48

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