The DOI matches its Crossref record; 2 of the 2 references it cites were found in a registry or an index.
Three‐Dimensional Nanostructures for Photonics
Abstract
Recent progress in direct laser writing of three‐dimensional (3D) polymer nanostructures for photonics is reviewed. This technology has reached a level of maturity at which it can be considered as the 3D analogue of planar electron‐beam lithography. Combined with atomic‐layer deposition and/or chemical‐vapor deposition of dielectrics—the 3D analogues of planar evaporation technologies, the 3D polymer templates can be converted or inverted into 3D high‐refractive‐index‐contrast nanostructures. Examples discussed in this review include positive and inverse 3D silicon‐based woodpile photonic crystals possessing complete photonic bandgaps, novel optical resonator designs within these structures, 3D chiral photonic crystals for polarization‐state manipulation, and 3D icosahedral photonic quasicrystals. The latter represent a particularly complex 3D nanostructure.
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Cites
Finer features for functional microdevices
Kawata, S., Sun, H.-B., Tanaka, T., & Takada, K. (2001) · Nature · doi:10.1038/35089130 · Cited by 2,871
Recent progress in multiphoton microfabrication
Maruo, S., & Fourkas, J. T. (2008) · Laser & Photonics Reviews · doi:10.1002/lpor.200710039 · Cited by 390
Cited by
Scalable submicrometer additive manufacturing
Saha, S. K., Wang, D., Nguyen, V. H., Chang, Y., Oakdale, J. S., & Chen, S.-C. (2019) · Science · doi:10.1126/science.aax8760 · Cited by 513
Ultrahigh-printing-speed photoresists for additive manufacturing
Liu, T., Tao, P., Wang, X., Wang, H., He, M., Wang, Q., Cui, H., Wang, J., Tang, Y., Tang, J., et al. (2024) · Nature Nanotechnology · doi:10.1038/s41565-023-01517-w · Cited by 63
Metadata
- Authors
- von Freymann, G., Ledermann, A., Thiel, M., Staude, I., Essig, S., Busch, K., & Wegener, M.
- Venue
- Advanced Functional Materials
- Publisher
- Wiley
- Published
- 2010-03-29
- Volume
- 20
- Issue
- 7
- Pages
- 1038-1052
- ISSN
- 1616-301X (ISSN-L)
- 1616-3028
- OpenAlex
- W2105435722
- Cited by
- 352
- References
- 2
- FWCI
- 15.86
- Type
- journal article
- Language
- en
- Open access
- closed
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- von Freymann, G., Ledermann, A., Thiel, M., Staude, I., Essig, S., Busch, K., & Wegener, M. (2010). Three‐Dimensional Nanostructures for Photonics. Advanced Functional Materials. https://doi.org/10.1002/adfm.200901838
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