The DOI matches its Crossref record.
One‐Step Direct‐Patterning Template Utilizing Self‐Assembly of POSS‐Containing Block Copolymers
Abstract
We report the self-assembly of organic-inorganic block copolymers (BCP) in thin-films by simple solvent annealing on unmodified substrates. The resulting vertically oriented lamellae and cylinders are converted to a hard silica mask by a single step highly selective oxygen plasma etching. The size of the resulting nanostructures in the case of cylinders is less than 10 nm.
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Citations
Cited by
Oligosaccharide/silicon-containing block copolymers with 5 nm features for lithographic applications
Cushen, J. D., Otsuka, I., Bates, C. M., Halila, S., Fort, S., Rochas, C., Easley, J. A., Rausch, E. L., Thio, A., Borsali, R., et al. (2012) · ACS Nano · doi:10.1021/nn300459r · Cited by 211
Biradar, M. R., Sagdic, G., Yuan, C., Marui, R., & Ober, C. K. (2026) · Chemical Reviews · doi:10.1021/acs.chemrev.5c01043 · Cited by 6
Metadata
- Authors
- Hirai, T., Leolukman, M., Liu, C. C., Han, E., Kim, Y. J., Ishida, Y., Hayakawa, T., Kakimoto, M., Nealey, P. F., & Gopalan, P.
- Venue
- Advanced Materials
- Publisher
- Wiley
- Published
- 2009-11-19
- Volume
- 21
- Issue
- 43
- Pages
- 4334-4338
- ISSN
- 0935-9648 (ISSN-L)
- 1521-4095
- OpenAlex
- W2034205871
- Cited by
- 180
- References
- 0
- FWCI
- 5.90
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: One‐Step Direct‐Patterning Template Utilizing Self‐Assembly of POSS‐Containing Block Copolymers. https://app.cochat.ai/papers/10.1002/adma.200900518
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- Hirai, T., Leolukman, M., Liu, C. C., Han, E., Kim, Y. J., Ishida, Y., Hayakawa, T., Kakimoto, M., Nealey, P. F., & Gopalan, P. (2009). One‐Step Direct‐Patterning Template Utilizing Self‐Assembly of POSS‐Containing Block Copolymers. Advanced Materials. https://doi.org/10.1002/adma.200900518
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
