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Cited by 545

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Spin coating of thin and ultrathin polymer films

Hall, David B., Underhill, Patrick, Torkelson, John M.·1998·Polymer Engineering & Science

Abstract

The spin coating of thin (> 200 nm thick) and ultrathin (< 200 nm thick) polymer films is examined in several solvents of varying volatility over a broad range of polymer solution concentrations and spin speeds. Experimentally measured film thicknesses are compared with a simple model proposed by Bornside, Macosko, and Scriven, which predicts film thickness based on the initial properties of the polymer solution, solvent, and spin speed. This model is found to predict film thickness values within 10% over the entire range of conditions explored, which gave film thicknesses from 10 nm to 33 μ:m. The model underpredicts film thickness for cases in which a very volatile solvent is used or the initial concentration of polymer is high, while overpredicting film thickness for cases in which a low volatility solvent is used or the initial polymer concentration is very low. These deviations are a consequence of how the model decouples fluid flow and solvent evaporation.

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Metadata

Authors
Hall, D. B., Underhill, P., & Torkelson, J. M.
Venue
Polymer Engineering & Science
Publisher
Wiley
Published
1998-12
Volume
38
Issue
12
Pages
2039-2045
ISSN
  • 0032-3888 (ISSN-L)
  • 1548-2634
OpenAlex
W2038232799
Cited by
545
References
0
FWCI
2.47
Type
journal article
Language
en
Open access
closed

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CoChat. (2026). Citation check: Spin coating of thin and ultrathin polymer films. https://app.cochat.ai/papers/10.1002/pen.10373
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Hall, D. B., Underhill, P., & Torkelson, J. M. (1998). Spin coating of thin and ultrathin polymer films. Polymer Engineering & Science. https://doi.org/10.1002/pen.10373

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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).

Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.