Chemo‐mechanical polish lithography: A pathway to low loss large‐scale photonic integration on lithium niobate on insulator
Open accessAbstract
We discuss the recent breakthrough in the field of photonic integrated circuits for generating high-quality photonic structures on lithium niobate (LN) on insulator (LNOI). This is enabled by the development of chemo-mechanical polish lithography (CMPL). We begin with a brief introduction of the background, followed by the description of the CMPL technique that holds the promise for realizing LNOI waveguides of ultralow propagation loss approaching the absorption limit of LN. We demonstrate fabrication of low loss optical waveguides with the CMPL and construction of beamsplitters with the fabricated LNOI waveguides. At last, some conclusions and future perspectives will be given. A video abstract of this article can be found at: https://youtu.be/sgnecU_QzcY
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LNOI has been employed for electro-optic modulators, directional couplers, second harmonic generation, and spontaneous parametric down-conversion.
“LNOI has already been employed for the realisation of a variety of devices, such as electro-optic modulators [7-9], directional couplers [10,11], as well as for second harmonic generation [12-14] and spontaneous parametric down-conversion [15-17].”
From Demonstration of Hong-Ou-Mandel interference in an LNOI directional coupler (2023) · cites this paper as [11]
Coherent two-octave-spanning supercontinuum generation and fCEO detection through spectral overlap of second harmonic with supercontinuum was achieved in a single LN waveguide.
“Coherent two-octave-spanning supercontinuum generation and f CEO detection through the spectral overlap of the second harmonic component with the generated supercontinuum spectrum was achieved in a single LN waveguide [65].”
From Integrated photonics on thin-film lithium niobate (2021) · cites this paper as [65]
The position of the dispersive wave can be predicted at near zero crossings of the dispersion operator.
“The position of the dispersive wave (indicated by the arrows) can be predicted at near zero crossings of the dispersion operator.”
From Integrated photonics on thin-film lithium niobate (2021) · cites this paper as [65]
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References 39 · Cited by 136
- Authors
- Wang, M., Wu, R., Lin, J., Zhang, J., Fang, Z., Chai, Z., & Cheng, Y.
- Affiliations
- East China Normal University (CN)
- Chinese Academy of Sciences (CN)
- Shanxi University (CN)
- Corresponding author
- Cheng, Ya
- Venue
- Quantum Engineering
- Publisher
- Wiley
- Published
- 2019-03
- Volume
- 1
- Issue
- 1
- Pages
- e9
- ISSN
- 2577-0470 (ISSN-L)
- OpenAlex
- W2921900175
- Cited by
- 136
- References
- 39
- Citations by year
- 2026: 3 · 2025: 10 · 2024: 22 · 2023: 17 · 2022: 13 · 2021: 35 · 2020: 19 · 2019: 17
- FWCI
- 9.15
- Type
- journal article
- Language
- en
- Open access
- bronze
- doi.org
- Licence
- Locations
- Quantum Engineering (publishedVersion)
- Funders
- National Basic Research Program of China (2018YFB0504400)
- National Natural Science Foundation of China (11822410, 11874154, 11874375, 11734009, 61761136006, 11674340, 61675220, 61590934, 61575211, 61505231, 11604351)
- Chinese Academy of Sciences (XDB16000000, QYZDJ‐SSW‐SLH010, QCH‐2018‐8)
- Shanghai Municipal Human Resources and Social Security Bureau (1601031F30)
- Topics
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Photorefractive and Nonlinear Optics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
- Physical Sciences › Engineering › Computational Mechanics › Laser Material Processing Techniques
- Keywords
- lithium niobate on insulator, photonic integrated circuits, waveguide fabrication, beam splitter
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