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Spectroscopic ellipsometry and polarimetry for materials and systems analysis at the nanometer scale: state-of-the-art, potential, and perspectives
Open accessAbstract
This paper discusses the fundamentals, applications, potential, limitations, and future perspectives of polarized light reflection techniques for the characterization of materials and related systems and devices at the nanoscale. These techniques include spectroscopic ellipsometry, polarimetry, and reflectance anisotropy. We give an overview of the various ellipsometry strategies for the measurement and analysis of nanometric films, metal nanoparticles and nanowires, semiconductor nanocrystals, and submicron periodic structures. We show that ellipsometry is capable of more than the determination of thickness and optical properties, and it can be exploited to gain information about process control, geometry factors, anisotropy, defects, and quantum confinement effects of nanostructures.
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Cited by
Joudeh, N., & Linke, D. (2022) · Journal of Nanobiotechnology · doi:10.1186/s12951-022-01477-8 · Cited by 1,908
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Losurdo, M., Giangregorio, M. M., Capezzuto, P., & Bruno, G. (2011) · Physical Chemistry Chemical Physics · doi:10.1039/c1cp22347j · Cited by 472
Self-citationSanz, J. M., Ortiz, D., Alcaraz de la Osa, R., Saiz, J. M., González, F., Brown, A. S., Losurdo, M., Everitt, H. O., & Moreno, F. (2013) · The Journal of Physical Chemistry C · doi:10.1021/jp405773p · Cited by 320
Self-citationThermally stable coexistence of liquid and solid phases in gallium nanoparticles
Losurdo, M., Suvorova, A., Rubanov, S., Hingerl, K., & Brown, A. S. (2016) · Nature Materials · doi:10.1038/nmat4705 · Cited by 158
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Metadata
- Authors
- Losurdo, M., Bergmair, M., Bruno, G., Cattelan, D., Cobet, C., de Martino, A., Fleischer, K., Dohcevic-Mitrovic, Z., Esser, N., Galliet, M., Gajic, R., Hemzal, D., Hingerl, K., Humlicek, J., Ossikovski, R., Popovic, Z. V., & Saxl, O.
- Venue
- Journal of Nanoparticle Research
- Published
- 2009-06-12
- Volume
- 11
- Issue
- 7
- Pages
- 1521-1554
- ISSN
- 1388-0764 (ISSN-L)
- 1572-896X
- OpenAlex
- W2165763532
- Cited by
- 230
- References
- 0
- FWCI
- 6.60
- Type
- journal article
- Language
- en
- Open access
- hybrid
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- Losurdo, M., Bergmair, M., Bruno, G., Cattelan, D., Cobet, C., de Martino, A., Fleischer, K., Dohcevic-Mitrovic, Z., Esser, N., Galliet, M., Gajic, R., Hemzal, D., Hingerl, K., Humlicek, J., Ossikovski, R., Popovic, Z. V., & Saxl, O. (2009). Spectroscopic ellipsometry and polarimetry for materials and systems analysis at the nanometer scale: state-of-the-art, potential, and perspectives. Journal of Nanoparticle Research. https://doi.org/10.1007/s11051-009-9662-6
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
