The DOI matches its Crossref record; 3 of the 3 references it cites were found in a registry or an index.
An innovative way of etching MoS2: Characterization and mechanistic investigation
Open accessAbstract
We report a systematic study of the etching of MoS2 crystals by using XeF2 as a gaseous reactant. By controlling the etching process, monolayer MoS2 with uniform morphology can be obtained. The Raman and photoluminescence spectra of the resulting material were similar to those of exfoliated MoS2. Utilizing this strategy, different patterns such as a Hall bar structure and a hexagonal array can be realized. Furthermore, the etching mechanism was studied by introducing graphene as an etching mask. We believe our technique opens an easy and controllable way of etching MoS2, which can be used to fabricate complex nanostructures, such as nanoribbons, quantum dots, and transistor structures. This etching process using XeF2 can also be extended to other interesting two-dimensional crystals.
Overview
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Integrity signals
Registry
Cites
Statistics
Verification
Claims the paper makes
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Self-check
Percentages, sums and reported differences re-computed from the paper’s own numbers.
The self-check needs the paper’s full text.
Citations
Cites
Two-dimensional gas of massless Dirac fermions in graphene
Novoselov, K. S., Geim, A. K., Morozov, S. V., Jiang, D., Katsnelson, M. I., Grigorieva, I. V., Dubonos, S. V., & Firsov, A. A. (2005) · Nature · doi:10.1038/nature04233 · Cited by 21,611
Narrow graphene nanoribbons from carbon nanotubes
Jiao, L., Zhang, L., Wang, X., Diankov, G., & Dai, H. (2009) · Nature · doi:10.1038/nature07919 · Cited by 2,441
Chen, Z., Cummins, D., Reinecke, B. N., Clark, E., Sunkara, M. K., & Jaramillo, T. F. (2011) · Nano Letters · doi:10.1021/nl2020476 · Cited by 1,153
Cited by
Covalent Nitrogen Doping and Compressive Strain in MoS2 by Remote N2 Plasma Exposure
Azcatl, A., Qin, X., Prakash, A., Zhang, C., Cheng, L., Wang, Q., Lu, N., Kim, M. J., Kim, J., Cho, K., et al. (2016) · Nano Letters · doi:10.1021/acs.nanolett.6b01853 · Cited by 491
Schmidt, H., Giustiniano, F., & Eda, G. (2015) · Chemical Society Reviews · doi:10.1039/c5cs00275c · Cited by 466
Self-citationSamadi, M., Sarikhani, N., Zirak, M., Zhang, H., Zhang, H.-L., & Moshfegh, A. Z. (2018) · Nanoscale Horizons · doi:10.1039/c7nh00137a · Cited by 408
Face the Edges: Catalytic Active Sites of Nanomaterials
Ni, B., & Wang, X. (2015) · Advanced Science · doi:10.1002/advs.201500085 · Cited by 219
Zhang, X., Jia, F., & Song, S. (2021) · Chemical Engineering Journal · doi:10.1016/j.cej.2020.127013 · Cited by 145
Metadata
- Authors
- Huang, Y., Wu, J., Xu, X., Ho, Y., Ni, G., Zou, Q., Koon, G. K. W., Zhao, W., Castro Neto, A. H., Eda, G., Shen, C., & Özyilmaz, B.
- Venue
- Nano Research
- Publisher
- Tsinghua University Press
- Published
- 2013-02-21
- Volume
- 6
- Issue
- 3
- Pages
- 200-207
- ISSN
- 1998-0000 (ISSN-L)
- 1998-0124
- OpenAlex
- W2116294656
- Cited by
- 159
- References
- 3
- FWCI
- 7.25
- Type
- journal article
- Language
- en
- Open access
- green
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review
How to cite
Cite CoChat for the checks on this page, and the paper for its own findings.
- This page
- CoChat. (2026). Citation check: An innovative way of etching MoS2: Characterization and mechanistic investigation. https://app.cochat.ai/papers/10.1007/s12274-013-0296-8
- The paper
- Huang, Y., Wu, J., Xu, X., Ho, Y., Ni, G., Zou, Q., Koon, G. K. W., Zhao, W., Castro Neto, A. H., Eda, G., Shen, C., & Özyilmaz, B. (2013). An innovative way of etching MoS2: Characterization and mechanistic investigation. Nano Research. https://doi.org/10.1007/s12274-013-0296-8
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
