Improving smoothing efficiency of rigid conformal polishing tool using time-dependent smoothing evaluation model
Open accessAbstract
A rigid conformal (RC) lap can smooth mid-spatial-frequency (MSF) errors, which are naturally smaller than the tool size, while still removing large-scale errors in a short time. However, the RC-lap smoothing efficiency performance is poorer than expected, and existing smoothing models cannot explicitly specify the methods to improve this efficiency. We presented an explicit time-dependent smoothing evaluation model that contained specific smoothing parameters directly derived from the parametric smoothing model and the Preston equation. Based on the time-dependent model, we proposed a strategy to improve the RC-lap smoothing efficiency, which incorporated the theoretical model, tool optimization, and efficiency limit determination. Two sets of smoothing experiments were performed to demonstrate the smoothing efficiency achieved using the time-dependent smoothing model. A high, theory-like tool influence function and a limiting tool speed of 300 RPM were o
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Various tool types have been developed including multilayer elastic tools, viscoelastic tools (like Newtonian fluids), semi-flexible tools (e.g. thin metal layer), viscoplastic (pitch) tools, and mechanically driven tools.
“Various tool types have been developed including multilayer elastic tools, viscoelastic tools (like Newtonian fluids) [18, 30, 31], semi-flexible tools (e.g. thin metal layer) [17, 19, 20], viscoplastic (pitch) tools [19, 27, 28, 32], and mechanically driven tools[33].”
From Smoothing tool design and performance during subaperture glass polishing (2023) · cites this paper as [31]
The Introduction describes a rigid conformal lap using a visco-elastic fluid, supporting this source's citation for a viscoelastic tool. But it calls the fluid non-Newtonian, as does Section 2; it does not support the parenthetical example of a Newtonian fluid. The other tool types have separate citations in the citing sentence. (LLM, conf=0.89)
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Research works printed but not linked: 14
- T. Hull, M. J. Riso, J. M. Barentine, and A. Magruder, "Mid-spatial frequency matters: examples of the control of the power spectral density and what that means to the performance of imaging systems," SPIE, 2012, 8353: 835329-1-835329-17.
- D. W. Kim and J. H. Burge, "Rigid conformal polishing tool using non-linear visco-elastic effect," Optics Express, 2010, 18(3): 2242-2257.
- H. M. Martin, D. S. Anderson, J. R. P. Angel, R. H. Nagel, S. C. West, and R. S. Young, "Progress in the stressed-lap polishing of a 1.8-mf/1 mirror," SPIE, 1990, 1236: 682-690.
- J. H. Burge, B. Anderson, S. Benjamin, M. K. Cho, K. Z. Smith, and M. J. Valente, "Development of optimal grinding and polishing tools for aspheric surfaces," SPIE, 1990, 4451: 153-164.
- Y. Shu, X. Nie, F. Shi, and S. Li, "Compare study between smoothing efficiencies of epicyclic motion and orbital motion," Optik -International J ournal for Light and Electron Optics, 2014, 125(16): 4441-4445.
- N. J. Brown, P. C. Baker, and R. E. Parks, "Polishing-to-figuring transition in turned optics," Contemporary Methods of Optical Fabrication, 1981, 306(6): 58-65.
- R. A. Jones, "Computer simulation of smoothing during computer-controlled optical polishing," Applied Optics, 1995, 34(7): 1162-1169.
- P. K. Mehta and P. B. Reid, "Mathematical model for optical smoothing prediction of high-spatial- frequency surface errors," SPIE, 1999, 3786: 447-459.
- M. T. Tuell, J. H. Burge, and B. Anderson. "Aspheric optics: Smoothing the ripples with semi-flexible tools," Optical Engineering, 2002, 15(2): 1473-1474.
- D. W. Kim, W. H. Park, H. K. An, and J. H. Burge, "Parametric smoothing model for visco-elastic polishing tools," Optics Express, 2010, 18(21): 22515-22526.
- Y. Shu, D. W. Kim, H. M. Martin, and J. H. Burge, "Correlation-based smoothing model for optical polishing," Optics Express, 2013, 21(23): 28771-28782.
- Y. Shu, X. Nie, F. Shi, and S. Li, "Smoothing evolution model for computer controlled optical surfacing," Journal of Optical Technology, 2014, 81(3): 164-167.
- X. Nie, S. Li, F. Shi, and H. Hu, "Generalized numerical pressure distribution model for smoothing polishing of irregular midspatial frequency errors," Applied Optics, 2014, 53(6): 1020-1027.
- A. C. Fischer-Cripps, "Multiple-frequency dynamic nanoindentation testing," Journal of Materials Research, 2004, 19(19): 2981-2988.
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Smoothing tool design and performance during subaperture glass polishing
Suratwala, T., Tham, G., Steele, R., Wong, L., Menapace, J., Ray, N., & Bauman, B. (2023) · Applied Optics · doi:10.1364/ao.482739 · Cited by 11 · see citing works
- Authors
- Song, C., Zhang, X., Zhang, X., Hu, H., & Zeng, X.
- Affiliations
- Chinese Academy of Sciences (CN)
- Corresponding author
- Song, Chi
- Venue
- Photonic Sensors
- Publisher
- Tsinghua University Press
- Published
- 2017-01-19
- Volume
- 7
- Issue
- 2
- Pages
- 171-181
- ISSN
- 1674-9251 (ISSN-L)
- 2190-7439
- OpenAlex
- W2578413463
- Cited by
- 8
- References
- 0
- Citations by year
- 2026: 2 · 2024: 1 · 2023: 3 · 2019: 1 · 2018: 1
- FWCI
- 0.25
- Type
- journal article
- Language
- en
- Open access
- diamond
- doi.org
- Locations
- Photonic Sensors (publishedVersion, cc-by)
- DOAJ (DOAJ: Directory of Open Access Journals) (submittedVersion)
- Funders
- National Natural Science Foundation of China (61210015, 61605202)
- Topics
- Physical Sciences › Engineering › Biomedical Engineering › Advanced Surface Polishing Techniques
- Physical Sciences › Engineering › Computational Mechanics › Surface Roughness and Optical Measurements
- Physical Sciences › Engineering › Biomedical Engineering › Advanced optical system design
- Keywords
- polishing tools, mid-spatial frequency error, Preston equation, tool influence function, tool speed
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