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Atomic layer epitaxy
Abstract
Atomic layer epitaxy (ALE) is a surface-controlled process for thin film manufacturing, for formation of atomically controlled surfaces and for epitaxial growth of single crystals. It is based on the saturation of individual, sequentially performed surface reactions between the substrate and each of the reactants needed. The saturation mechanism of ALE sequences results in an inherent elimination of pinholes, conformal coating characteristics as well as in a thickness uniformity and homogeneity of the thin films produced. ALE is also an effective tool in a precise construction of superlattices, superalloys, tailored molecular structures and interface layers.
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Cited by
Atomic layer deposition (ALD): from precursors to thin film structures
Leskelä, M., & Ritala, M. (2002) · Thin Solid Films · doi:10.1016/s0040-6090(02)00117-7 · Cited by 1,314
The Colloid Chemical Approach to Nanostructured Materials**
Fendler, J. H., & Meldrum, F. C. (1995) · Advanced Materials · doi:10.1002/adma.19950070703 · Cited by 722
Surface chemistry of Al2O3 deposition using Al(CH3)3 and H2O in a binary reaction sequence
Dillon, A. C., Ott, A. W., Way, J. D., & George, S. M. (1995) · Surface Science · doi:10.1016/0039-6028(95)90033-0 · Cited by 462
Surface Chemistry for Molecular Layer Deposition of Organic and Hybrid Organic−Inorganic Polymers
George, S. M., Yoon, B., & Dameron, A. A. (2009) · Accounts of Chemical Research · doi:10.1021/ar800105q · Cited by 377
Lu, J., Low, K.-B., Lei, Y., Libera, J. A., Nicholls, A., Stair, P. C., & Elam, J. W. (2014) · Nature Communications · doi:10.1038/ncomms4264 · Cited by 233
Metadata
- Authors
- Suntola, T.
- Venue
- Thin Solid Films
- Publisher
- Elsevier BV
- Published
- 1992-08
- Volume
- 216
- Issue
- 1
- Pages
- 84-89
- ISSN
- 0040-6090 (ISSN-L)
- OpenAlex
- W2030668500
- Cited by
- 1,367
- References
- 0
- FWCI
- 4.53
- Type
- journal article
- Language
- en
- Open access
- closed
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- Suntola, T. (1992). Atomic layer epitaxy. Thin Solid Films. https://doi.org/10.1016/0040-6090(92)90874-b
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