The DOI matches its Crossref record; 51 of the 51 references it cites were found in a registry or an index.
Chemical solution deposition of electronic oxide films
Abstract
The chemical solution deposition (CSD) technique as a highly flexible method for the fabrication of electronic oxide thin films is reviewed. Various chemical aspects of different approaches are discussed, including sol–gel, hybrid, and metallo-organic decomposition (MOD) routes, which all have been successfully applied for the deposition of this class of materials. Principles of the selection and properties of the educts, the mechanism of film crystallization, and tailoring of microstructure through manipulation of deposition parameters are reported. The role of thermodynamics on the phase transformation process is also reviewed. Finally, some of the applications for chemical solution-derived thin films currently under development are illustrated, and recent advances, such as the deposition of less than 100-nm-thick films, lateral nanostructuring, and the formation of single nano-sized grains are considered.
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Cites
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Self-citationPhysics and Applications of DIP Coating and Spin Coating
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Functionally graded materials: A review of fabrication and properties
Naebe, M., & Shirvanimoghaddam, K. (2016) · Applied Materials Today · doi:10.1016/j.apmt.2016.10.001 · Cited by 986
Processing, Structure, Properties, and Applications of PZT Thin Films
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Chemical Solution Deposition of Functional Oxide Thin Films
(2013) · doi:10.1007/978-3-211-99311-8 · Cited by 403
Solution processing of transparent conductors: from flask to film
Pasquarelli, R. M., Ginley, D. S., & O'Hayre, R. (2011) · Chemical Society Reviews · doi:10.1039/c1cs15065k · Cited by 403
Erdem, D., Shi, Y., Heiligtag, F. J., Kandemir, A. C., Tervoort, E., Rupp, J. L. M., & Niederberger, M. (2015) · Journal of Materials Chemistry C · doi:10.1039/c5tc02214b · Cited by 30
Metadata
- Authors
- Schwartz, R. W., Schneller, T., & Waser, R.
- Venue
- Comptes Rendus. Chimie
- Publisher
- MathDoc/Centre Mersenne
- Published
- 2004-05-01
- Volume
- 7
- Issue
- 5
- Pages
- 433-461
- ISSN
- 1631-0748 (ISSN-L)
- 1878-1543
- OpenAlex
- W1963889222
- Cited by
- 469
- References
- 51
- FWCI
- 22.23
- Type
- journal article
- Language
- en
- Open access
- closed
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