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MEMS electrostatic micropower generator for low frequency operation
Abstract
This paper describes the analysis, simulation and testing of a microengineered motion-driven power generator, suitable for application in sensors within or worn on the human body. Micro-generators capable of powering sensors have previously been reported, but these have required high frequency mechanical vibrations to excite a resonant structure. However, body-driven movements are slow and irregular, with large displacements, and hence do not effectively couple energy into such generators. The device presented here uses an alternative, non-resonant operating mode. Analysis of this generator shows its potential for the application considered, and shows the possibility to optimise the design for particular conditions. An experimental prototype based on a variable parallel-plate capacitor operating in constant charge mode is described which confirms the analysis and simulation models. This prototype, when precharged to 30 V, develops an output voltage of 250 V, corresponding to 0.3J per cycle. The experimental test procedure and the instrumentation are also described.
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Citations
Cited by
Nanotechnology‐Enabled Energy Harvesting for Self‐Powered Micro‐/Nanosystems
Wang, Z. L., & Wu, W. (2012) · Angewandte Chemie International Edition · doi:10.1002/anie.201201656 · Cited by 1,063
Reviving Vibration Energy Harvesting and Self-Powered Sensing by a Triboelectric Nanogenerator
Chen, J., & Wang, Z. L. (2017) · Joule · doi:10.1016/j.joule.2017.09.004 · Cited by 1,021
Sliding-Triboelectric Nanogenerators Based on In-Plane Charge-Separation Mechanism
Wang, S., Lin, L., Xie, Y., Jing, Q., Niu, S., & Wang, Z. L. (2013) · Nano Letters · doi:10.1021/nl400738p · Cited by 804
Yang, Y., Zhang, H., Lin, Z.-H., Zhou, Y. S., Jing, Q., Su, Y., Yang, J., Chen, J., Hu, C., & Wang, Z. L. (2013) · ACS Nano · doi:10.1021/nn403838y · Cited by 798
Erturk, A., Renno, J. M., & Inman, D. J. (2009) · Journal of Intelligent Material Systems and Structures · doi:10.1177/1045389x08098096 · Cited by 432
Metadata
- Authors
- Mitcheson, P. D., Miao, P., Stark, B. H., Yeatman, E. M., Holmes, A. S., & Green, T. C.
- Venue
- Sensors and Actuators A: Physical
- Publisher
- Elsevier BV
- Published
- 2004-09
- Volume
- 115
- Issue
- 2-3
- Pages
- 523-529
- ISSN
- 0924-4247 (ISSN-L)
- OpenAlex
- W2110434860
- Cited by
- 593
- References
- 0
- FWCI
- 21.39
- Type
- journal article
- Language
- en
- Open access
- closed
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- Mitcheson, P. D., Miao, P., Stark, B. H., Yeatman, E. M., Holmes, A. S., & Green, T. C. (2004). MEMS electrostatic micropower generator for low frequency operation. Sensors and Actuators A: Physical. https://doi.org/10.1016/j.sna.2004.04.026
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
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