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Effect of crystal structure on optical properties of TiO2 films grown by atomic layer deposition
Overview
Integrity signals
Registry
Cites
Statistics
Verification
Claims the paper makes
Claims other papers make about this one
Each is checked against this paper’s own text: does it say what the citing paper says it does?
In the citing paper
“In other common dielectric material choices such as TiO2, however, there is less control in materials processing, and variations in refractive index as large as 20% are observed [35].”
From Robust design of topology-optimized metasurfaces (2019) · cites this paper as [35]
Citations
The citation lists haven’t been fetched yet
References 14 · Cited by 280
Research works printed but not linked: 2
- Aleskovskii, 1990, Acta Polytechn. Scand. Chem. Techn. Ser., 195, 155
- Valeev, 1963, Opt. Spectrosc. (USSR), 15, 269
Metadata
- Authors
- Aarik, J., Aidla, A., Kiisler, A.-A., Uustare, T., & Sammelselg, V.
- Affiliations
- University of Tartu (EE)
- Corresponding author
- Aarik, Jaan
- Venue
- Thin Solid Films
- Publisher
- Elsevier BV
- Published
- 1997-08
- Volume
- 305
- Issue
- 1-2
- Pages
- 270-273
- ISSN
- 0040-6090 (ISSN-L)
- OpenAlex
- W2064968281
- Cited by
- 280
- References
- 14
- Citations by year
- 2026: 3 · 2025: 10 · 2024: 5 · 2023: 8 · 2022: 6 · 2021: 10 · 2020: 16 · 2019: 14 · 2018: 9 · 2017: 10 · 2016: 11 · 2015: 11 · 2014: 8 · 2013: 22 · 2012: 14
- FWCI
- 3.75
- Type
- journal article
- Language
- en
- Open access
- closed
- Licence
- www.elsevier.com/tdm/userlicense/1.0/ (tdm)
- Locations
- Thin Solid Films (publishedVersion)
- Funders
- Eesti Teadusfondi
- Kansainvälisen Liikkuvuuden ja Yhteistyön Keskus
- Topics
- Physical Sciences › Energy › Renewable Energy, Sustainability and the Environment › TiO2 Photocatalysis and Solar Cells
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Semiconductor materials and devices
- Physical Sciences › Materials Science › Surfaces, Coatings and Films › Optical Coatings and Gratings
- Keywords
- TiO2 thin films, atomic layer deposition, crystal structure, optical properties, refractive index, optical band gap, anatase, amorphous TiO2, growth temperature, crystallographic texture
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
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How to cite
Cite CoChat for the checks on this page, and the paper for its own findings.
- This page
- CoChat. (2026). Citation check: Effect of crystal structure on optical properties of TiO2 films grown by atomic layer deposition. https://app.cochat.ai/papers/10.1016/s0040-6090(97)00135-1
- The paper
- Aarik, J., Aidla, A., Kiisler, A.-A., Uustare, T., & Sammelselg, V. (1997). Effect of crystal structure on optical properties of TiO2 films grown by atomic layer deposition. Thin Solid Films. https://doi.org/10.1016/s0040-6090(97)00135-1
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
