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Cited by 17Optical Polarization and EllipsometrySurface Roughness and Optical MeasurementsElectron and X-Ray Spectroscopy Techniques

The DOI matches its Crossref record; 164 of the 164 references it cites were found in a registry or an index.

Ellipsometric Techniques to Study Surfaces and Thin Films

Rzhanov, A.V., Svitashev, K.K.·1979·Advances in Electronics and Electron Physics
DOI 10.1016/s0065-2539(08)60765-9
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Cites

164 of 164 references verified0 citation errors · 0 not checkable

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Citations

Cites

Show all 164 references

Research works printed but not linked: 69

  1. Agajanian, 1977, Solid Stain Technol., 20, 36
  2. Alexandrov, 1976, Opt. Spektrosk., 41, 855
  3. Algazin, 1977, Opt. Spektrosk., 43, 168
  4. Algazin, 1978, Opt. Spectrosc (USSR, 45, 330
  5. Antziferov, 1975, Mikroelektronika (Akad. Nauk SSSR, 4, 273
  6. Archipenko, 1977, Dokl. Akad. Nauk SSSR, 235, 323
  7. Aspnes, 1975, Appl. Opt., 14, 220, 10.1364/AO.14.001131 · DOI
  8. Azzam, 1976, Optik, 45, 209
  9. Azzam, 1972, J. Opt. Soc. Am., 62, 1375
  10. Baklanov, 1975, Opt. Spektrosk., 39, 362
  11. Batavin, 1974, Elektron. Prom.-st., 5, 42
  12. Beresneva, 1977, Pis'ma Zh. Tekh. Fiz., 3, 420
  13. Blumkina, 1976, Opt. Spektrosk., 40, 596
  14. Bockshtein, 1973, Opt. Spektrosk., 35, 577
  15. Dagman, 1979, Opt. Spectrosk., 46, 559
  16. DeNicola, 1971, J. Opt. Soc. Am., 61, 1583
  17. Dokuchaev, 1972, Elektron. Prom.-st., 7, 25
  18. Edwards, 1975, IBM Technol. Disclosure Bull., 17, 3120
  19. Egorova, 1974, Opt. Spektrosk., 36, 773
  20. Gorshkov, 1970, Zarubezhnaya Radioelektronika, 10, 97
  21. Kirillova, 1975, Opt. Spektrosk., 39, 106
  22. Kucirek, 1973, Czech. J. Phys. (Engl. Transl., b23, 1362
  23. Kudo, 1968, Hokkaido Daigaki Kogakubu Kenkyu Hokoku, 47, 141
  24. Kurdiani, 1964, Sov. Phys. Solid-State Engl. Trans., 5, 1310
  25. Kuzjmin, 1976, Opt.-Mekh. Prom.-st., 43, 38
  26. Leluk, 1964, Opt. Spektrosk., 16, 484
  27. Lihl, 1967, Acta Phys. Austriaca, 25, 193
  28. Lisitza, 1958, Opt. Spektrosk., 5, 622
  29. Lisitza, 1959, Opt. Spektrosk., 7, 552
  30. Mardezhov, 1977, Mikroelektronika (Akad. Nauk SSSR, 6, 427
  31. Mishnev, 1972, Mikroelektronika (Akad. Nauk SSSR, 1, 153
  32. Monin, 1968, C.R. Hebd. Seances Acad. Sci., Ser. B, 267, 1078
  33. Motulevich, 1957, Opt. Spektrosk., 2, 633
  34. Padalka, 1962, Opt. Spektrosk., 12, 291
  35. Rakov, 1968, Opt. Spektrosk., 25, 117
  36. Rzhanov, A. V. 1977 Proc. 7th Int. Vac. Congr., 3rd Int. Conf. Solid Surf. Int. Union Vac. Sci. Technol. Appl., 9th, 1977 p. 655.
  37. Rzhanov, 1973, Fiz. Tekh. Poluprovodn., 7, 1727
  38. Rzhanov, 1975, Mikroelektronika (Akad. Nauk SSSR, 4, 3
  39. Semenenko, 1975, Opt. Spektrosk., 39, 967
  40. Semenenko, 1977, Pis'ma Zh. Tekh. Fiz., 3, 83
  41. Semenenko, 1978, Ukr. Fiz. Zh., 23, 158
  42. Semenenko, 1976, Opt. Spektrosk., 41, 456
  43. Semenenko, 1976, Fiz. Tverd. Tela. (Leningrad, 18, 3511
  44. Semenenko, 1977, Pis'ma Zh. Tekh. Fiz., 3, 1303
  45. Semenenko, 1978, Ukr. Fiz. Zh., 23, 504
  46. Semenenko, 1972, Opt. Spek-trosk., 32, 1204
  47. Shklyarevsky, 1957, Opt. Spektrosk., 3, 361
  48. Shklyarevsky, 1959, Opt. Spektrosk., 6, 776
  49. Shklyarevsky, 1968, Opt. Spektrosk., 4, 792
  50. Shklyarevsky, 1959, Opt. Spektrosk., 6, 528
  51. Shklyarevsky, 1966, Opt. Spektrosk., 20, 1074
  52. Sirohi, 1969, Br. J. Appl. Phys., 2, 468
  53. Smith, 1963, Natl. Bur. Stand. (U.S.), Spec. Publ., 256, 83
  54. Svitashev, 1971, Opt. Spektrosk., 30, 532
  55. Svitashev, 1972, Mikroelektronika (Akad. Nauk SSSR, 1, 153
  56. Svitashev, 1972, Opt. Spektrosk., 33, 742
  57. Svitashev, 1973, Mikroelektronika (Akad. Nauk SSSR, 2, 454
  58. Svitashev, 1973, Opt. Spektrosk., 34, 941
  59. Svitashev, 1977, Opt. Spektrosk., 42, 969
  60. Svitashev, 1977, Opt. Spektrosk., 42, 1142
  61. Svitashev, 1977, Mikro-elektronika (Akad. Nauk SSSR, 6, 258
  62. Tomar, 1975, Optik (Stuttgart, 42, 297
  63. Usoskin, 1973, Opt. Spektrosk., 34, 954
  64. Vasiljeva, 1974, Izv. Akad. Nauk SSSR, Neorg. Mater., 10, 1389
  65. Vasiljeva, 1971, Zh. Fiz. Khim., 45, 1132
  66. Vasiljeva, 1974, Opt. Spektrosk., 37, 574
  67. Winterbottom, 1963, Natl. Bur. Stand. (U.S.), Spec. Publ., 256, 97
  68. Zolotarev, 1970, Opt. Spektrosk., 29, 66
  69. Zolotarev, 1973, Opt. Spektrosk., 34, 319

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Metadata

Authors
Rzhanov, A. V., & Svitashev, K. K.
Affiliations
Institute of Semiconductor Physics (RU)
Venue
Advances in Electronics and Electron Physics
Publisher
Elsevier
Published
1979
Pages
1-84
ISSN
0065-2539 (ISSN-L)
DOI
10.1016/s0065-2539(08)60765-9
OpenAlex
W968170350
Cited by
17
References
164
Citations by year
2021: 1 · 2015: 1
FWCI
3.94
Type
book chapter
Language
en
Open access
closed
Locations
Advances in electronics and electron physics (publishedVersion)
Topics
  • Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Optical Polarization and Ellipsometry
  • Physical Sciences › Physics and Astronomy › Instrumentation › Surface Roughness and Optical Measurements
  • Physical Sciences › Materials Science › Surfaces, Coatings and Films › Electron and X-Ray Spectroscopy Techniques
Keywords
ellipsometry, thin films, optical constants, surface treatment, interface structure, multilayer systems, surface acoustic waves, waveguides, optoelectronics, acousto-optics, integrated photonics, film growth monitoring

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CoChat. (2026). Citation check: Ellipsometric Techniques to Study Surfaces and Thin Films. https://app.cochat.ai/papers/10.1016/s0065-2539(08)60765-9
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Rzhanov, A. V., & Svitashev, K. K. (1979). Ellipsometric Techniques to Study Surfaces and Thin Films. Advances in Electronics and Electron Physics. https://doi.org/10.1016/s0065-2539(08)60765-9

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