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Plasma-Treated Thickness-Controlled Two-Dimensional Black Phosphorus and Its Electronic Transport Properties
Abstract
We report the preparation of thickness-controlled few-layer black phosphorus (BP) films through the modulated plasma treatment of BP flakes. Not only does the plasma treatment control the thickness of the BP film, it also removes the chemical degradation of the exposed oxidized BP surface, which results in enhanced field-effect transistor (FET) performance. Our fabricated BP FETs were passivated with poly(methyl methacrylate) (PMMA) immediately after the plasma etching process. With these techniques, a high field-effect mobility was achieved, 1150 cm(2)/(V s), with an Ion/Ioff ratio of ∼10(5) at room temperature. Furthermore, a fabricated FET with plasma-treated few-layer BP that was passivated with PMMA was found to retain its I-V characteristics and thus to exhibit excellent environmental stability over several weeks.
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Graphene: Status and Prospects
Geim, A. K. (2009) · Science · doi:10.1126/science.1158877 · Cited by 13,942
Cited by
Recent progress in 2D group-VA semiconductors: from theory to experiment
Zhang, S., Guo, S., Chen, Z., Wang, Y., Gao, H., Gómez-Herrero, J., Ares, P., Zamora, F., Zhu, Z., & Zeng, H. (2018) · Chemical Society Reviews · doi:10.1039/c7cs00125h · Cited by 850
Black Phosphorus Rediscovered: From Bulk Material to Monolayers
Gusmão, R., Sofer, Z., & Pumera, M. (2017) · Angewandte Chemie International Edition · doi:10.1002/anie.201610512 · Cited by 521
Emerging Trends in Phosphorene Fabrication towards Next Generation Devices
Dhanabalan, S. C., Ponraj, J. S., Guo, Z., Li, S., Bao, Q., & Zhang, H. (2017) · Advanced Science · doi:10.1002/advs.201600305 · Cited by 344
Chen, P., Li, N., Chen, X., Ong, W.-J., & Zhao, X. (2017) · 2D Materials · doi:10.1088/2053-1583/aa8d37 · Cited by 283
Metadata
- Authors
- Jia, J., Jang, S. K., Lai, S., Xu, J., Choi, Y. J., Park, J.-H., & Lee, S.
- Venue
- ACS Nano
- Publisher
- American Chemical Society (ACS)
- Published
- 2015-08-31
- Volume
- 9
- Issue
- 9
- Pages
- 8729-8736
- ISSN
- 1936-0851 (ISSN-L)
- 1936-086X
- OpenAlex
- W2413336263
- Cited by
- 225
- References
- 1
- FWCI
- 8.53
- Type
- journal article
- Language
- en
- Open access
- closed
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- Jia, J., Jang, S. K., Lai, S., Xu, J., Choi, Y. J., Park, J.-H., & Lee, S. (2015). Plasma-Treated Thickness-Controlled Two-Dimensional Black Phosphorus and Its Electronic Transport Properties. ACS Nano. https://doi.org/10.1021/acsnano.5b04265
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