Submicrometer Nanostructure-Based RGB Filters for CMOS Image Sensors
Open accessAbstract
Digital color imaging relies on spectral filters on top of a pixelated sensor, such as a CMOS image sensor. An important parameter of imaging devices is their resolution, which depends on the size of the pixels. For many applications, a high resolution is desirable, consequently requiring small spectral filters. Dielectric nanostructures, due to their resonant behavior and its tunability, offer the possibility to be assembled into flexible and miniature spectral filters, which could potentially replace conventional pigmented and dye-based color filters. In this paper, we demonstrate the generation of transmissive structural colors based on uniform-height amorphous silicon nanostructures. We optimize the structures for the primary RGB colors and report the construction of submicrometer RGB filter arrays for a pixel size down to 0.5 μm.
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The cylindrical dielectric particle metasurfaces reported in [19] gave filters which lacked purity and were found near the white point of the CIE 1931 color space.
“The cylindrical dielectric particle metasurfaces reported in [19] gave filters which lacked purity and were found near the white point of the CIE 1931 color space.”
From Robust inverse design of all-dielectric metasurface transmission-mode color filters (2020) · cites this paper as [19]
The paper does report amorphous-silicon nanodisk arrays (Supporting Information S3, p. 22), but it describes their filters as producing distinguishable RGB colors, not as lacking color purity (main text, pp. 7, 11). It reports color-quality values of 0.74, 0.59, and 0.52 for the optimized red, green, and blue filters (p. 6). Although it refers to a CIE 1931 chromaticity diagram, our copy does not say the filters lie near its white point. (LLM, conf=0.83)
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Experimental — accuracy not yet measuredThe void metasurfaces reported in [18] tend to have an improved color gamut as compared to [19], but the purity of blue color is extremely poor because of reduced transmission efficiency.
“Although the void metasurfaces reported in [18] tend to have an improved color gamut as compared to [19], the purity of blue color is extremely poor because of reduced transmission efficiency.”
From Robust inverse design of all-dielectric metasurface transmission-mode color filters (2020) · cites this paper as [19]
The filter-results passage (p. 6) reports lower blue than red transmittance and color-quality values for this paper’s RGB filters. It does not compare them with the void metasurfaces in [18], describe the blue color as extremely poor, or establish reduced transmission efficiency as the cause of poor purity. (LLM, conf=0.72)
Experimental — accuracy not yet measuredThe reports by Horie and coworkers and by Berzins and coworkers are the only ones that focus on transmission-mode dielectric metasurfaces for primary color image sensor CFAs.
“To the best of our knowledge, the reports by Horie and coworkers [18] and by Berzins and coworkers [19] are the only ones that focus on transmission-mode dielectric metasurfaces for primary color image sensor CFAs.”
From Robust inverse design of all-dielectric metasurface transmission-mode color filters (2020) · cites this paper as [19]
The structures obtained in this work provide good transmission efficiency along with an enhanced color gamut with respect to other dielectric color filters reported in [18,19].
“It can be observed that the structures obtained in this work provide a good transmission efficiency along with an enhanced color gamut with respect to other dielectric color filters reported in [18,19].”
From Robust inverse design of all-dielectric metasurface transmission-mode color filters (2020) · cites this paper as [19]
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Cites
Printing Beyond sRGB Color Gamut by Mimicking Silicon Nanostructures in Free-Space
Dong, Z., Ho, J., Yu, Y. F., Fu, Y. H., Paniagua-Dominguez, R., Wang, S., Kuznetsov, A. I., & Yang, J. K. W. (2017) · Nano Letters · doi:10.1021/acs.nanolett.7b03613 · Cited by 335 · see citing works
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Research works printed but not linked: 6
- [1](1) van de Groep, J.; Polman, A. Designing Dielectric Resonators on Substrates: Combining Magnetic and Electric Resonances. Opt. Express 2013 , 21 (22), 26285. -
- [2](2) Kuznetsov, A. I.; Miroshnichenko, A. E.; Fu, Y. H.; Zhang, J.; Lukyanchukl, B. Magnetic Light. Sci. Rep. 2012 , 2 , 1-6. -
- [3](3) Yu, Y.; Chen, Q.; Wen, L.; Hu, X.; Zhang, H.-F. Spatial Optical Crosstalk in CMOS Image Sensors Integrated with Plasmonic Color Filters. Opt. Express 2015 , 23 (17), 21994. -
- [4](4) Horie, Y.; Han, S.; Lee, J. Y.; Kim, J.; Kim, Y.; Arbabi, A.; Shin, C.; Shi, L.; Arbabi, E.; Kamali, S. M.; et al. Visible Wavelength Color Filters Using Dielectric Subwavelength Gratings for Backside-Illuminated CMOS Image Sensor Technologies. Nano Lett. 2017 , 17 (5), 3159-3164. -
- [5](5) Berzins, J.; Silvestri, F.; Gerini, G.; Setzpfandt, F.; Pertsch, T.; Berzins, J.; Silvestri, F.; Gerini, G.; Setzpfandt, F.; Pertsch, T.; et al. Color Filter Arrays Based on Dielectric Metasurface Elements. In Proc. SPIE ; 2018; Vol. 10671, p 106711F. -
- [6](6) Smith, T.; Guild, J. The CIE Calorimetric Standards and Their Use. Trans. Opt. Soc. 1931 , 33 .
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Sorted by citations
Robust inverse design of all-dielectric metasurface transmission-mode color filters
Panda, S. S., Vyas, H. S., & Hegde, R. S. (2020) · Optical Materials Express · doi:10.1364/ome.409186 · Cited by 33 · see citing works
- Authors
- Berzinš, J., Fasold, S., Pertsch, T., Bäumer, S. M. B., & Setzpfandt, F.
- Affiliations
- Friedrich Schiller University Jena , , Albert-Einstein-Str. 15 , ,
- Friedrich Schiller University Jena (DE)
- Fraunhofer Institute for Applied Optics and Precision Engineering (DE)
- TNO , Stieltjesweg 1 , ,
- Venue
- ACS Photonics
- Publisher
- American Chemical Society (ACS)
- Published
- 2019-03-15
- Volume
- 6
- Issue
- 4
- Pages
- 1018-1025
- ISSN
- 2330-4022 (ISSN-L)
- OpenAlex
- W2902197101
- Cited by
- 73
- References
- 1
- Citations by year
- 2026: 4 · 2025: 8 · 2024: 8 · 2023: 12 · 2022: 14 · 2021: 12 · 2020: 10 · 2019: 5
- FWCI
- 4.51
- Type
- journal article
- Language
- en
- Open access
- hybrid
- doi.org
- Locations
- ACS Photonics (publishedVersion, other-oa)
- arXiv (Cornell University) (submittedVersion)
- Figshare (submittedVersion, cc-by)
- Publikationsdatenbank der Fraunhofer-Gesellschaft (Fraunhofer-Gesellschaft) (submittedVersion)
- TNO Repository (submittedVersion)
- Fraunhofer-Publica (Fraunhofer-Gesellschaft) (submittedVersion)
- Repository hosted by TU Delft Library (TU Delft) (submittedVersion)
- Data Archiving and Networked Services (DANS) (submittedVersion)
- arXiv (Cornell University)
- Funders
- European Union's Horizon 2020 research and innovation programme under Marie Sklodowska-Curie (675745)
- Topics
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Photonic Crystals and Applications
- Physical Sciences › Materials Science › Electronic, Optical and Magnetic Materials › Metamaterials and Metasurfaces Applications
- Physical Sciences › Materials Science › Surfaces, Coatings and Films › Optical Coatings and Gratings
- Keywords
- CMOS image sensor, dielectric nanostructures, structural color, high-resolution imaging, tunable resonance, color filter array
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