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Plasmonic Nanolithography
Abstract
In this paper, we demonstrate high-density nanolithography by utilizing surface plasmons (SPs). SPs are excited on an aluminum substrate perforated with 2-D hole arrays using a near UV light source in order to resolve sub-wavelength features with high transmission. Our lithography experiments using a 365 nm wavelength light source demonstrate 90 nm dot array patterns on a 170 nm period, well beyond the diffraction limit of far-field optical lithography. In far-field transmission measurements, strong UV light transmission and the wavelength-dependent transmission are observed, which confirms the contribution of SPs. Furthermore, an exposure with larger spacing between the mask and photoresist has been explored for potential noncontact lithography.
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Cited by
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Mosk, A. P., Lagendijk, A., Lerosey, G., & Fink, M. (2012) · Nature Photonics · doi:10.1038/nphoton.2012.88 · Cited by 1,536
Nanohole-Enhanced Raman Scattering
Brolo, A. G., Arctander, E., Gordon, R., Leathem, B., & Kavanagh, K. L. (2004) · Nano Letters · doi:10.1021/nl048818w · Cited by 431
Localized Surface Plasmon Resonance Spectroscopy of Triangular Aluminum Nanoparticles
Chan, G. H., Zhao, J., Schatz, G. C., & Van Duyne, R. P. (2008) · The Journal of Physical Chemistry C · doi:10.1021/jp804088z · Cited by 401
Extraordinary Acoustic Transmission through a 1D Grating with Very Narrow Apertures
Lu, M.-H., Liu, X.-K., Feng, L., Li, J., Huang, C.-P., Chen, Y.-F., Zhu, Y.-Y., Zhu, S.-N., & Ming, N.-B. (2007) · Physical Review Letters · doi:10.1103/physrevlett.99.174301 · Cited by 289
Surface plasmon polaritons in topological Weyl semimetals
Hofmann, J., & Das Sarma, S. (2016) · Physical Review B · doi:10.1103/physrevb.93.241402 · Cited by 153
Metadata
- Authors
- Srituravanich, W., Fang, N., Sun, C., Luo, Q., & Zhang, X.
- Venue
- Nano Letters
- Publisher
- American Chemical Society (ACS)
- Published
- 2004-05-19
- Volume
- 4
- Issue
- 6
- Pages
- 1085-1088
- ISSN
- 1530-6984 (ISSN-L)
- 1530-6992
- OpenAlex
- W4256681254
- Cited by
- 524
- References
- 0
- FWCI
- 15.64
- Type
- journal article
- Language
- en
- Open access
- closed
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
