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Zeptogram-Scale Nanomechanical Mass Sensing

Yang, Y. T., Callegari, C., Feng, X. L., Ekinci, K. L., Roukes, M. L.·2006·Nano Letters

Abstract

Very high frequency (VHF) nanoelectromechanical systems (NEMS) provide unprecedented sensitivity for inertial mass sensing. We demonstrate in situ measurements in real time with mass noise floor approximately 20 zg. Our best mass resolution corresponds to approximately 7 zg, equivalent to approximately 30 xenon atoms or the mass of an individual 4 kDa molecule. Detailed analysis of the ultimate sensitivity of such devices based on these experimental results indicates that NEMS can ultimately provide inertial mass sensing of individual intact, electrically neutral macromolecules with single-Dalton (1 amu) resolution.

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Metadata

Authors
Yang, Y. T., Callegari, C., Feng, X. L., Ekinci, K. L., & Roukes, M. L.
Venue
Nano Letters
Published
2006-03-15
Volume
6
Issue
4
Pages
583-586
ISSN
  • 1530-6984 (ISSN-L)
  • 1530-6992
OpenAlex
W2129434196
Cited by
1,041
References
0
FWCI
38.45
Type
journal article
Language
en
Open access
closed

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CoChat. (2026). Citation check: Zeptogram-Scale Nanomechanical Mass Sensing. https://app.cochat.ai/papers/10.1021/nl052134m
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Yang, Y. T., Callegari, C., Feng, X. L., Ekinci, K. L., & Roukes, M. L. (2006). Zeptogram-Scale Nanomechanical Mass Sensing. Nano Letters. https://doi.org/10.1021/nl052134m

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