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Chip-Scale Nanofabrication of Single Spins and Spin Arrays in Diamond
Open accessAbstract
We demonstrate a technique to nanofabricate nitrogen vacancy (NV) centers in diamond based on broad-beam nitrogen implantation through apertures in electron beam lithography resist. This method enables high-throughput nanofabrication of single NV centers on sub-100-nm length scales. Secondary ion mass spectroscopy measurements facilitate depth profiling of the implanted nitrogen to provide three-dimensional characterization of the NV center spatial distribution. Measurements of NV center coherence with on-chip coplanar waveguides suggest a pathway for incorporating this scalable nanofabrication technique in future quantum applications.
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Cited by
The nitrogen-vacancy colour centre in diamond
Doherty, M. W., Manson, N. B., Delaney, P., Jelezko, F., Wrachtrup, J., & Hollenberg, L. C. L. (2013) · Physics Reports · doi:10.1016/j.physrep.2013.02.001 · Cited by 2,866
Nitrogen-Vacancy Centers in Diamond: Nanoscale Sensors for Physics and Biology
Schirhagl, R., Chang, K., Loretz, M., & Degen, C. L. (2014) · Annual Review of Physical Chemistry · doi:10.1146/annurev-physchem-040513-103659 · Cited by 1,608
Material platforms for spin-based photonic quantum technologies
Atatüre, M., Englund, D., Vamivakas, N., Lee, S.-Y., & Wrachtrup, J. (2018) · Nature Reviews Materials · doi:10.1038/s41578-018-0008-9 · Cited by 766
Polytype control of spin qubits in silicon carbide
Falk, A. L., Buckley, B. B., Calusine, G., Koehl, W. F., Dobrovitski, V. V., Politi, A., Zorman, C. A., Feng, P. X.-L., & Awschalom, D. D. (2013) · Nature Communications · doi:10.1038/ncomms2854 · Cited by 411
Self-citationHigh-fidelity spin entanglement using optimal control
Dolde, F., Bergholm, V., Wang, Y., Jakobi, I., Naydenov, B., Pezzagna, S., Meijer, J., Jelezko, F., Neumann, P., Schulte-Herbrüggen, T., et al. (2014) · Nature Communications · doi:10.1038/ncomms4371 · Cited by 325
Metadata
- Authors
- Toyli, D. M., Weis, C. D., Fuchs, G. D., Schenkel, T., & Awschalom, D. D.
- Venue
- Nano Letters
- Publisher
- American Chemical Society (ACS)
- Published
- 2010-07-23
- Volume
- 10
- Issue
- 8
- Pages
- 3168-3172
- ISSN
- 1530-6984 (ISSN-L)
- 1530-6992
- OpenAlex
- W2950683416
- Cited by
- 309
- References
- 0
- FWCI
- 11.27
- Type
- journal article
- Language
- en
- Open access
- hybrid
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- Toyli, D. M., Weis, C. D., Fuchs, G. D., Schenkel, T., & Awschalom, D. D. (2010). Chip-Scale Nanofabrication of Single Spins and Spin Arrays in Diamond. Nano Letters. https://doi.org/10.1021/nl102066q
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
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