The DOI matches its Crossref record; 4 of the 4 references it cites were found in a registry or an index.
Layer-Controlled, Wafer-Scale, and Conformal Synthesis of Tungsten Disulfide Nanosheets Using Atomic Layer Deposition
Abstract
The synthesis of atomically thin transition-metal disulfides (MS2) with layer controllability and large-area uniformity is an essential requirement for their application in electronic and optical devices. In this work, we describe a process for the synthesis of WS2 nanosheets through the sulfurization of an atomic layer deposition (ALD) WO3 film with systematic layer controllability and wafer-level uniformity. The X-ray photoemission spectroscopy, Raman, and photoluminescence measurements exhibit that the ALD-based WS2 nanosheets have good stoichiometry, clear Raman shift, and bandgap dependence as a function of the number of layers. The electron mobility of the monolayer WS2 measured using a field-effect transistor (FET) with a high-k dielectric gate insulator is shown to be better than that of CVD-grown WS2, and the subthreshold swing is comparable to that of an exfoliated MoS2 FET device. Moreover, by utilizing the high conformality of the ALD process, we have developed a process for the fabrication of WS2 nanotubes.
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Cites
Electronics and optoelectronics of two-dimensional transition metal dichalcogenides
Wang, Q. H., Kalantar-Zadeh, K., Kis, A., Coleman, J. N., & Strano, M. S. (2012) · Nature Nanotechnology · doi:10.1038/nnano.2012.193 · Cited by 16,374
Two-dimensional atomic crystals
Novoselov, K. S., Jiang, D., Schedin, F., Booth, T. J., Khotkevich, V. V., Morozov, S. V., & Geim, A. K. (2005) · Proceedings of the National Academy of Sciences · doi:10.1073/pnas.0502848102 · Cited by 11,788
The chemistry of two-dimensional layered transition metal dichalcogenide nanosheets
Chhowalla, M., Shin, H. S., Eda, G., Li, L.-J., Loh, K. P., & Zhang, H. (2013) · Nature Chemistry · doi:10.1038/nchem.1589 · Cited by 10,034
Enhanced catalytic activity in strained chemically exfoliated WS2 nanosheets for hydrogen evolution
Voiry, D., Yamaguchi, H., Li, J., Silva, R., Alves, D. C. B., Fujita, T., Chen, M., Asefa, T., Shenoy, V. B., Eda, G., et al. (2013) · Nature Materials · doi:10.1038/nmat3700 · Cited by 2,641
Cited by
Recent development of two-dimensional transition metal dichalcogenides and their applications
Choi, W., Choudhary, N., Han, G. H., Park, J., Akinwande, D., & Lee, Y. H. (2017) · Materials Today · doi:10.1016/j.mattod.2016.10.002 · Cited by 2,769
Self-citationShi, Y., Li, H., & Li, L.-J. (2015) · Chemical Society Reviews · doi:10.1039/c4cs00256c · Cited by 845
Mahler, B., Hoepfner, V., Liao, K., & Ozin, G. A. (2014) · Journal of the American Chemical Society · doi:10.1021/ja506261t · Cited by 837
Samadi, M., Sarikhani, N., Zirak, M., Zhang, H., Zhang, H.-L., & Moshfegh, A. Z. (2018) · Nanoscale Horizons · doi:10.1039/c7nh00137a · Cited by 408
Li, H., Li, Y., Aljarb, A., Shi, Y., & Li, L.-J. (2018) · Chemical Reviews · doi:10.1021/acs.chemrev.7b00212 · Cited by 382
Metadata
- Authors
- Song, J.-G., Park, J., Lee, W., Choi, T., Jung, H., Lee, C. W., Hwang, S.-H., Myoung, J. M., Jung, J.-H., Kim, S.-H., Lansalot-Matras, C., & Kim, H.
- Venue
- ACS Nano
- Publisher
- American Chemical Society (ACS)
- Published
- 2013-11-27
- Volume
- 7
- Issue
- 12
- Pages
- 11333-11340
- ISSN
- 1936-0851 (ISSN-L)
- 1936-086X
- OpenAlex
- W2045988635
- Cited by
- 376
- References
- 4
- FWCI
- 12.73
- Type
- journal article
- Language
- en
- Open access
- closed
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- Song, J.-G., Park, J., Lee, W., Choi, T., Jung, H., Lee, C. W., Hwang, S.-H., Myoung, J. M., Jung, J.-H., Kim, S.-H., Lansalot-Matras, C., & Kim, H. (2013). Layer-Controlled, Wafer-Scale, and Conformal Synthesis of Tungsten Disulfide Nanosheets Using Atomic Layer Deposition. ACS Nano. https://doi.org/10.1021/nn405194e
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