The DOI matches its Crossref record; 53 of the 53 references it cites were found in a registry or an index.
MEMS-tunable dielectric metasurface lens
Open accessAbstract
Varifocal lenses, conventionally implemented by changing the axial distance between multiple optical elements, have a wide range of applications in imaging and optical beam scanning. The use of conventional bulky refractive elements makes these varifocal lenses large, slow, and limits their tunability. Metasurfaces, a new category of lithographically defined diffractive devices, enable thin and lightweight optical elements with precisely engineered phase profiles. Here we demonstrate tunable metasurface doublets, based on microelectromechanical systems (MEMS), with more than 60 diopters (about 4%) change in the optical power upon a 1-μm movement of one metasurface, and a scanning frequency that can potentially reach a few kHz. They can also be integrated with a third metasurface to make compact microscopes (~1 mm thick) with a large corrected field of view (~500 μm or 40 degrees) and fast axial scanning for 3D imaging. This paves the way towards MEMS-integrated metasurfaces as a platform for tunable and reconfigurable optics.
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Cites
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Self-citationDielectric Gradient Metasurface Optical Elements
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Self-citationMultiwavelength Achromatic Metasurfaces by Dispersive Phase Compensation
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Broadband achromatic optical metasurface devices
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Metamaterial-inspired silicon nanophotonics
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Cited by
Spatiotemporal light control with active metasurfaces
Shaltout, A. M., Shalaev, V. M., & Brongersma, M. L. (2019) · Science · doi:10.1126/science.aat3100 · Cited by 1,020
Stacked Intelligent Metasurfaces for Efficient Holographic MIMO Communications in 6G
An, J., Xu, C., Ng, D. W. K., Alexandropoulos, G. C., Huang, C., Yuen, C., & Hanzo, L. (2023) · IEEE Journal on Selected Areas in Communications · doi:10.1109/jsac.2023.3288261 · Cited by 358
Single-shot quantitative phase gradient microscopy using a system of multifunctional metasurfaces
Kwon, H., Arbabi, E., Kamali, S. M., Faraji-Dana, M., & Faraon, A. (2020) · Nature Photonics · doi:10.1038/s41566-019-0536-x · Cited by 319
Self-citationWhen Metasurface Meets Hologram: Principle and Advances
Jiang, Q., Jin, G., & Cao, L. (2019) · Advances in Optics and Photonics · doi:10.1364/aop.11.000518 · Cited by 318
Metasurface‐Empowered Optical Multiplexing and Multifunction
Chen, S., Liu, W., Li, Z., Cheng, H., & Tian, J. (2020) · Advanced Materials · doi:10.1002/adma.201805912 · Cited by 312
Metadata
- Authors
- Arbabi, E., Arbabi, A., Kamali, S. M., Horie, Y., Faraji-Dana, M., & Faraon, A.
- Venue
- Nature Communications
- Published
- 2018-02-23
- Volume
- 9
- Issue
- 1
- Pages
- 812-812
- ISSN
- 2041-1723 (ISSN-L)
- OpenAlex
- W2886728826
- Cited by
- 772
- References
- 53
- FWCI
- 22.53
- Type
- journal article
- Language
- en
- Open access
- gold
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