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High‐resolution, energy‐dispersive microcalorimeter spectrometer for X‐ray microanalysis
Abstract
We have developed a prototype X‐ray microcalorimeter spectrometer with high energy resolution for use in X‐ray microanalysis. The microcalorimeter spectrometer system consists of a superconducting transition‐edge sensor X‐ray microcalorimeter cooled to an operating temperature near 100 mK by a compact adiabatic demagnetization refrigerator, a superconducting quantum interference device current amplifier followed by pulse‐shaping amplifiers and pileup rejection circuitry, and a multichannel analyser with computer interface for the real‐time acquisition of X‐ray spectra. With the spectrometer mounted on a scanning electron microscope, we have achieved an instrument response energy resolution of better than 10 eV full width at half‐maximum (FWHM) over a broad energy range at real‐time output count rates up to 150 s−1. Careful analysis of digitized X‐ray pulses yields an instrument‐response energy resolution of 7.2 ± 0.4 eV FWHM at 5.89 keV for Mn Kα 1,2 X‐rays from a radioactive 55 Fe source, the best reported energy resolution for any energy‐dispersive detector.
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Cited by
A High Spectral Resolution Observation of the Soft X‐Ray Diffuse Background with Thermal Detectors
McCammon, D., Almy, R., Apodaca, E., Bergmann Tiest, W., Cui, W., Deiker, S., Galeazzi, M., Juda, M., Lesser, A., Mihara, T., et al. (2002) · The Astrophysical Journal · doi:10.1086/341727 · Cited by 375
Demonstration of a low-noise near-infrared photon counter with multiphoton discrimination
Miller, A. J., Nam, S. W., Martinis, J. M., & Sergienko, A. V. (2003) · Applied Physics Letters · doi:10.1063/1.1596723 · Cited by 285
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Metadata
- Authors
- WOLLMAN, D. A., IRWIN, K. D., HILTON, G. C., DULCIE, L. L., NEWBURY, D. E., & MARTINIS, J. M.
- Venue
- Journal of Microscopy
- Publisher
- Wiley
- Published
- 1997-12
- Volume
- 188
- Issue
- 3
- Pages
- 196-223
- ISSN
- 0022-2720 (ISSN-L)
- 1365-2818
- OpenAlex
- W2065413946
- Cited by
- 241
- References
- 0
- FWCI
- 21.08
- Type
- journal article
- Language
- en
- Open access
- closed
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- WOLLMAN, D. A., IRWIN, K. D., HILTON, G. C., DULCIE, L. L., NEWBURY, D. E., & MARTINIS, J. M. (1997). High‐resolution, energy‐dispersive microcalorimeter spectrometer for X‐ray microanalysis. Journal of Microscopy. https://doi.org/10.1046/j.1365-2818.1997.2670824.x
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