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Nanolithographic templates from diblock copolymer thin films
Abstract
We describe a technique for creating a thin polystyrene film containing a periodic array of cylindrical holes, with a hole size of approximately 13 nm and a lattice constant of 27 nm. The starting material is a polystyrene-polybutadiene diblock copolymer, which self-assembles into a hexagonally packed array of polybutadiene cylinders embedded in a polystyrene matrix. A technique described previously is used to orient the cylinders normal to the plane of the film. The polybutadiene domains are then removed by reaction with ozone, which attacks the double bonds in the polybutadiene backbone. Films of this type could potentially be used as templates for nanolithography on a scale not readily accessed by other techniques.
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Citations
Cited by
Solvent Vapor Annealing of Block Polymer Thin Films
Sinturel, C., Vayer, M., Morris, M., & Hillmyer, M. A. (2013) · Macromolecules · doi:10.1021/ma400735a · Cited by 543
Microdomain Orientation of PS-b-PMMA by Controlled Interfacial Interactions
Ham, S., Shin, C., Kim, E., Ryu, D. Y., Jeong, U., Russell, T. P., & Hawker, C. J. (2008) · Macromolecules · doi:10.1021/ma8007338 · Cited by 238
Biradar, M. R., Sagdic, G., Yuan, C., Marui, R., & Ober, C. K. (2026) · Chemical Reviews · doi:10.1021/acs.chemrev.5c01043 · Cited by 6
Metadata
- Authors
- Mansky, P., Harrison, C. K., Chaikin, P. M., Register, R. A., & Yao, N.
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 1996-04-29
- Volume
- 68
- Issue
- 18
- Pages
- 2586-2588
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W2042195344
- Cited by
- 200
- References
- 0
- FWCI
- 5.40
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: Nanolithographic templates from diblock copolymer thin films. https://app.cochat.ai/papers/10.1063/1.116192
- The paper
- Mansky, P., Harrison, C. K., Chaikin, P. M., Register, R. A., & Yao, N. (1996). Nanolithographic templates from diblock copolymer thin films. Applied Physics Letters. https://doi.org/10.1063/1.116192
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
