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Highly ordered nanochannel-array architecture in anodic alumina

Masuda, Hideki, Yamada, Haruki, Satoh, Masahiro, Asoh, Hidetaka, Nakao, Masashi, Tamamura, Toshiaki·1997·Applied Physics Letters

Abstract

The development of the ordered channel array in the anodic porous alumina was initiated by the textured pattern of the surface made by the molding process, and growth of an almost defect-free channel array can be achieved throughout the textured area. The long-range-ordered channel array with dimensions on the order of millimeters with a channel density of 1010 cm−2 was obtained, and the aspect ratio was over 150. The master for molding could be used many times, which makes it possible to overcome problems in the conventional nanolithographic technique, such as low through-put and high cost.

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Metadata

Authors
Masuda, H., Yamada, H., Satoh, M., Asoh, H., Nakao, M., & Tamamura, T.
Venue
Applied Physics Letters
Published
1997-11-10
Volume
71
Issue
19
Pages
2770-2772
ISSN
  • 0003-6951 (ISSN-L)
  • 1077-3118
OpenAlex
W2036078372
Cited by
1,166
References
0
FWCI
10.46
Type
journal article
Language
en
Open access
closed

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CoChat. (2026). Citation check: Highly ordered nanochannel-array architecture in anodic alumina. https://app.cochat.ai/papers/10.1063/1.120128
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Masuda, H., Yamada, H., Satoh, M., Asoh, H., Nakao, M., & Tamamura, T. (1997). Highly ordered nanochannel-array architecture in anodic alumina. Applied Physics Letters. https://doi.org/10.1063/1.120128

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