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Large area dense nanoscale patterning of arbitrary surfaces
Abstract
We demonstrate a large-area fabrication of hexagonally ordered metal dot arrays with an area density of ∼1011/cm2. We produced 20 nm dots with a 40 nm period by combining block copolymer nanolithography and a trilayer resist technique. A self-assembled spherical-phase block copolymer top layer spontaneously generated the pattern, acting as a template. The pattern was first transferred to a silicon nitride middle layer by reactive ion etch, producing holes. The nitride layer was then used as a mask to further etch into a polyimide bottom layer. The metal dots were produced by an electron beam evaporation followed by a lift-off process. Our method provides a viable route for highly dense nanoscale patterning of different materials on arbitrary surfaces.
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Cites
Quantized Hall Conductance in a Two-Dimensional Periodic Potential
Thouless, D. J., Kohmoto, M., Nightingale, M. P., & den Nijs, M. (1982) · Physical Review Letters · doi:10.1103/physrevlett.49.405 · Cited by 6,973
Anionic Polymerization of Vinyl Monomers
Morton, M., & Fetters, L. J. (1975) · Rubber Chemistry and Technology · doi:10.5254/1.3547458 · Cited by 461
Cited by
Block copolymer based nanostructures: Materials, processes, and applications to electronics
Kim, H.-C., Park, S.-M., & Hinsberg, W. D. (2010) · Chemical Reviews · doi:10.1021/cr900159v · Cited by 1,017
Nanostructure fabrication using block copolymers
Hamley, I. W. (2003) · Nanotechnology · doi:10.1088/0957-4484/14/10/201 · Cited by 773
Using Cylindrical Domains of Block Copolymers To Self-Assemble and Align Metallic Nanowires
Chai, J., & Buriak, J. M. (2008) · ACS Nano · doi:10.1021/nn700341s · Cited by 317
(2007) · doi:10.1002/9783527610570.ch9 · Cited by 20
Metadata
- Authors
- Park, M., Chaikin, P. M., Register, R. A., & Adamson, D. H.
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 2001-07-09
- Volume
- 79
- Issue
- 2
- Pages
- 257-259
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W2081479784
- Cited by
- 172
- References
- 2
- FWCI
- 11.32
- Type
- journal article
- Language
- en
- Open access
- closed
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
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