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High bandwidth nano-positioner: A robust control approach
Abstract
This article presents the design, identification, and control of a nano-positioning device suited to image biological samples as part of an atomic force microscope. The device is actuated by a piezoelectric stack and its motion is sensed by a linear variable differential transformer. It is demonstrated that the conventional proportional-integral control architecture does not meet the bandwidth requirements for positioning. The design and implementation of an H∞ controller demonstrates substantial improvements in the positioning speed and precision, while eliminating the undesirable nonlinear effects of the actuator. The characterization of the resulting device in terms of bandwidth, resolution, and repeatability provided illustrates the effectiveness of the modern robust control paradigm.
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Cited by
A survey on hysteresis modeling, identification and control
Hassani, V., Tjahjowidodo, T., & Do, T. N. (2014) · Mechanical Systems and Signal Processing · doi:10.1016/j.ymssp.2014.04.012 · Cited by 517
Leang, K. K., & Devasia, S. (2007) · IEEE Transactions on Control Systems Technology · doi:10.1109/tcst.2007.902956 · Cited by 381
Feng, J., Hajizadeh, I., Samadi, S., Sevil, M., Hobbs, N., Brandt, R., Lazaro, C., Maloney, Z., Yu, X., Littlejohn, E., et al. (2018) · IFAC-PapersOnLine · doi:10.1016/j.ifacol.2018.09.289 · Cited by 7
Metadata
- Authors
- Salapaka, S., Sebastian, A., Cleveland, J. P., & Salapaka, M. V.
- Venue
- Review of Scientific Instruments
- Publisher
- AIP Publishing
- Published
- 2002-09-01
- Volume
- 73
- Issue
- 9
- Pages
- 3232-3241
- ISSN
- 0034-6748 (ISSN-L)
- 1089-7623
- OpenAlex
- W2168717647
- Cited by
- 418
- References
- 0
- FWCI
- 30.42
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: High bandwidth nano-positioner: A robust control approach. https://app.cochat.ai/papers/10.1063/1.1499533
- The paper
- Salapaka, S., Sebastian, A., Cleveland, J. P., & Salapaka, M. V. (2002). High bandwidth nano-positioner: A robust control approach. Review of Scientific Instruments. https://doi.org/10.1063/1.1499533
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