The DOI matches its Crossref record.
Infrared absorption by conical silicon microstructures made in a variety of background gases using femtosecond-laser pulses
Abstract
We show that the near-unity infrared absorptance of conical microstructures fabricated by irradiating a Si(111) surface with 100 fs laser pulses depends on the ambient gas in which the structures are formed. SF6 produces an absorptance of 0.9 for radiation in the 1.2–2.5 μm wavelength range, higher than any of the other gases. Use of Cl2, N2, or air produces surfaces with absorptances intermediate between that for microstructures formed in SF6 and that for flat crystalline silicon, for which the absorptance is roughly 0.05–0.2 for a 260 μm thick sample. Secondary ion mass spectrometry shows that elements from the ambient gas are incorporated into the silicon surface in high concentration.
Overview
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Integrity signals
Registry
Cites
Statistics
Verification
Claims the paper makes
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Self-check
Percentages, sums and reported differences re-computed from the paper’s own numbers.
The self-check needs the paper’s full text.
Citations
Cited by
Ultrafast lasers—reliable tools for advanced materials processing
Sugioka, K., & Cheng, Y. (2014) · Light: Science & Applications · doi:10.1038/lsa.2014.30 · Cited by 1,545
Enabling Silicon for Solar-Fuel Production
Sun, K., Shen, S., Liang, Y., Burrows, P. E., Mao, S. S., & Wang, D. (2014) · Chemical Reviews · doi:10.1021/cr300459q · Cited by 393
Microstructured silicon photodetector
Huang, Z., Carey, J. E., Liu, M., Guo, X., Mazur, E., & Campbell, J. C. (2006) · Applied Physics Letters · doi:10.1063/1.2227629 · Cited by 317
Self-citation
Metadata
- Authors
- Younkin, R., Carey, J. E., Mazur, E., Levinson, J. A., & Friend, C. M.
- Venue
- Journal of Applied Physics
- Publisher
- AIP Publishing
- Published
- 2003-03-01
- Volume
- 93
- Issue
- 5
- Pages
- 2626-2629
- ISSN
- 0021-8979 (ISSN-L)
- 1089-7550
- OpenAlex
- W1966664178
- Cited by
- 243
- References
- 0
- FWCI
- 7.80
- Type
- journal article
- Language
- en
- Open access
- closed
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review
How to cite
Cite CoChat for the checks on this page, and the paper for its own findings.
- This page
- CoChat. (2026). Citation check: Infrared absorption by conical silicon microstructures made in a variety of background gases using femtosecond-laser pulses. https://app.cochat.ai/papers/10.1063/1.1545159
- The paper
- Younkin, R., Carey, J. E., Mazur, E., Levinson, J. A., & Friend, C. M. (2003). Infrared absorption by conical silicon microstructures made in a variety of background gases using femtosecond-laser pulses. Journal of Applied Physics. https://doi.org/10.1063/1.1545159
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
