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Current-free double-layer formation in a high-density helicon discharge

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Charles, Christine, Boswell, Rod·2003·Applied Physics Letters

Abstract

A strong, current-free, electric double-layer with eΦ/kTe∼3 and a thickness of less than 50 debye lengths has been experimentally observed in an expanding, high-density helicon sustained rf (13.56-MHz) discharge. The rapid potential decrease is associated with the “neck” of the vacuum vessel, where the glass source tube joins the aluminum diffusion chamber, and is only observed when the argon gas pressure is less than about 0.5 mTorr. The upstream electron temperature Te appears 25% greater than the downstream Te, and there is a density hole on the downstream edge. This experiment differs from others in that the potentials are self-consistently generated by the plasma itself, and there is no current flowing through an external circuit. The plasma electrons are heated by the rf fields in the source, provide the power to maintain the double-layer, and hence accelerate ions created in the source out into the diffusion chamber.

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Metadata

Authors
Charles, C., & Boswell, R.
Venue
Applied Physics Letters
Published
2003-03-03
Volume
82
Issue
9
Pages
1356-1358
ISSN
  • 0003-6951 (ISSN-L)
  • 1077-3118
OpenAlex
W1967522618
Cited by
307
References
0
FWCI
13.41
Type
journal article
Language
en
Open access
bronze

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