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Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems
Open accessAbstract
Nanomechanical resonators can now be realized that achieve fundamental resonance frequencies exceeding 1 GHz, with quality factors (Q) in the range 103⩽Q⩽105. The minuscule active masses of these devices, in conjunction with their high Qs, translate into unprecedented inertial mass sensitivities. This makes them natural candidates for a variety of mass sensing applications. Here we evaluate the ultimate mass sensitivity limits for nanomechanical resonators operating in vacuo that are imposed by a number of fundamental physical noise processes. Our analyses indicate that nanomechanical resonators offer immense potential for mass sensing—ultimately with resolution at the level of individual molecules.
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Frank, I. W., Tanenbaum, D. M., van der Zande, A. M., & McEuen, P. L. (2007) · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena · doi:10.1116/1.2789446 · Cited by 1,162
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Metadata
- Authors
- Ekinci, K. L., Yang, Y. T., & Roukes, M. L.
- Venue
- Journal of Applied Physics
- Publisher
- AIP Publishing
- Published
- 2004-03-01
- Volume
- 95
- Issue
- 5
- Pages
- 2682-2689
- ISSN
- 0021-8979 (ISSN-L)
- 1089-7550
- OpenAlex
- W2092445640
- Cited by
- 695
- References
- 0
- FWCI
- 15.97
- Type
- journal article
- Language
- en
- Open access
- green
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- Ekinci, K. L., Yang, Y. T., & Roukes, M. L. (2004). Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems. Journal of Applied Physics. https://doi.org/10.1063/1.1642738
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