The DOI matches its Crossref record; 3 of the 3 references it cites were found in a registry or an index.
Multiple-spot parallel processing for laser micronanofabrication
Abstract
A tightly focused femtosecond laser has been established as a unique tool for micronanostructure fabrication due to its intrinsic three-dimensional processing. In this letter, we utilize a microlens array to produce multiple spots for parallel fabrication, giving rise to a revolutionary augmentation for our previously developed single-beam two-photon photopolymerization technology [S. Kawata, H.-B. Sun, T. Tanaka, and K. Takada, Nature (London) 412, 697 (2001)]. Two- and three-dimensional multiple structures, such as microletter set and self-standing microspring array, are demonstrated as examples of mass production. More than 200 spot simultaneous fabrication has been realized by optimizing the exposure condition for the photopolymerizable resin, i.e., a two-order increase of yield efficiency. Potential applications of this technique are discussed.
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Cites
Finer features for functional microdevices
Kawata, S., Sun, H.-B., Tanaka, T., & Takada, K. (2001) · Nature · doi:10.1038/35089130 · Cited by 2,871
Self-citationThree-dimensional microfabrication with two-photon-absorbed photopolymerization
Maruo, S., Nakamura, O., & Kawata, S. (1997) · Optics Letters · doi:10.1364/ol.22.000132 · Cited by 1,952
Self-citationComplex micromachines produced and driven by light
Galajda, P., & Ormos, P. (2001) · Applied Physics Letters · doi:10.1063/1.1339258 · Cited by 565
Cited by
Optical storage arrays: a perspective for future big data storage
Gu, M., Li, X., & Cao, Y. (2014) · Light: Science & Applications · doi:10.1038/lsa.2014.58 · Cited by 542
Ultrafast laser nanostructuring of photopolymers: a decade of advances
Malinauskas, M., Farsari, M., Piskarskas, A., & Juodkazis, S. (2013) · Physics Reports · doi:10.1016/j.physrep.2013.07.005 · Cited by 431
Recent progress in multiphoton microfabrication
Maruo, S., & Fourkas, J. T. (2008) · Laser & Photonics Reviews · doi:10.1002/lpor.200710039 · Cited by 390
Ultrafast Laser Additive Manufacturing: A Review
Saunders, J., Elbestawi, M., & Fang, Q. (2023) · Journal of Manufacturing and Materials Processing · doi:10.3390/jmmp7030089 · Cited by 35
Metadata
- Authors
- Kato, J.-I., Takeyasu, N., Adachi, Y., Sun, H.-B., & Kawata, S.
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 2005-01-24
- Volume
- 86
- Issue
- 4
- Pages
- 044102
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W2024989976
- Cited by
- 303
- References
- 3
- FWCI
- 9.88
- Type
- journal article
- Language
- en
- Open access
- closed
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- Kato, J.-I., Takeyasu, N., Adachi, Y., Sun, H.-B., & Kawata, S. (2005). Multiple-spot parallel processing for laser micronanofabrication. Applied Physics Letters. https://doi.org/10.1063/1.1855404
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
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