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Nanoelectromechanical systems
Open accessAbstract
Nanoelectromechanical systems (NEMS) are drawing interest from both technical and scientific communities. These are electromechanical systems, much like microelectromechanical systems, mostly operated in their resonant modes with dimensions in the deep submicron. In this size regime, they come with extremely high fundamental resonance frequencies, diminished active masses,and tolerable force constants; the quality (Q) factors of resonance are in the range Q∼103–105—significantly higher than those of electrical resonant circuits. These attributes collectively make NEMS suitable for a multitude of technological applications such as ultrafast sensors, actuators, and signal processing components. Experimentally, NEMS are expected to open up investigations of phonon mediated mechanical processes and of the quantum behavior of mesoscopic mechanical systems. However, there still exist fundamental and technological challenges to NEMS optimization. In this review we shall provide a balanced introduction to NEMS by discussing the prospects and challenges in this rapidly developing field and outline an exciting emerging application, nanoelectromechanical mass detection.
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Cited by
Aspelmeyer, M., Kippenberg, T. J., & Marquardt, F. (2014) · Reviews of Modern Physics · doi:10.1103/revmodphys.86.1391 · Cited by 5,501
Advances in the Casimir Effect
Bordag, M., Klimchitskaya, G. L., Mohideen, U., & Mostepanenko, V. M. (2009) · doi:10.1093/acprof:oso/9780199238743.001.0001 · Cited by 1,284
Mechanical properties of suspended graphene sheets
Frank, I. W., Tanenbaum, D. M., van der Zande, A. M., & McEuen, P. L. (2007) · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena · doi:10.1116/1.2789446 · Cited by 1,162
Micro- and nanomechanical sensors for environmental, chemical, and biological detection
Waggoner, P. S., & Craighead, H. G. (2007) · Lab on a Chip · doi:10.1039/b707401h · Cited by 678
Near-field cavity optomechanics with nanomechanical oscillators
Anetsberger, G., Arcizet, O., Unterreithmeier, Q. P., Rivière, R., Schliesser, A., Weig, E. M., Kotthaus, J. P., & Kippenberg, T. J. (2009) · Nature Physics · doi:10.1038/nphys1425 · Cited by 499
Metadata
- Authors
- Ekinci, K. L., & Roukes, M. L.
- Venue
- Review of Scientific Instruments
- Publisher
- AIP Publishing
- Published
- 2005-05-26
- Volume
- 76
- Issue
- 6
- ISSN
- 0034-6748 (ISSN-L)
- 1089-7623
- OpenAlex
- W4292487398
- Cited by
- 1,374
- References
- 0
- FWCI
- 57.20
- Type
- journal article
- Language
- en
- Open access
- bronze
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