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Atom probe tomography
Open accessAbstract
The technique of atom probe tomography (APT) is reviewed with an emphasis on illustrating what is possible with the technique both now and in the future. APT delivers the highest spatial resolution (sub-0.3-nm) three-dimensional compositional information of any microscopy technique. Recently, APT has changed dramatically with new hardware configurations that greatly simplify the technique and improve the rate of data acquisition. In addition, new methods have been developed to fabricate suitable specimens from new classes of materials. Applications of APT have expanded from structural metals and alloys to thin multilayer films on planar substrates, dielectric films, semiconducting structures and devices, and ceramic materials. This trend toward a broader range of materials and applications is likely to continue.
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Wilde, S. A., Valley, J. W., Peck, W. H., & Graham, C. M. (2001) · Nature · doi:10.1038/35051550 · Cited by 1,744
Cited by
Jiang, K., Siahrostami, S., Akey, A. J., Li, Y., Lu, Z., Lattimer, J., Hu, Y., Stokes, C., Gangishetty, M., Chen, G., et al. (2017) · Chem · doi:10.1016/j.chempr.2017.09.014 · Cited by 406
Large volume serial section tomography by Xe Plasma FIB dual beam microscopy
Burnett, T. L., Kelley, R., Winiarski, B., Contreras, L., Daly, M., Gholinia, A., Burke, M. G., & Withers, P. J. (2016) · Ultramicroscopy · doi:10.1016/j.ultramic.2015.11.001 · Cited by 339
Atomic electron tomography: 3D structures without crystals
Miao, J., Ercius, P., & Billinge, S. J. L. (2016) · Science · doi:10.1126/science.aaf2157 · Cited by 319
Hellmann, R., Cotte, S., Cadel, E., Malladi, S., Karlsson, L. S., Lozano-Perez, S., Cabié, M., & Seyeux, A. (2015) · Nature Materials · doi:10.1038/nmat4172 · Cited by 315
Metadata
- Authors
- Kelly, T. F., & Miller, M. K.
- Venue
- Review of Scientific Instruments
- Publisher
- AIP Publishing
- Published
- 2007-03-01
- Volume
- 78
- Issue
- 3
- Pages
- 031101-031101
- ISSN
- 0034-6748 (ISSN-L)
- 1089-7623
- OpenAlex
- W3022476158
- Cited by
- 867
- References
- 1
- FWCI
- 30.17
- Type
- journal article
- Language
- en
- Open access
- hybrid
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
