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Electron Energy-Loss Spectroscopy in the Electron Microscope
Abstract
1. An Introduction to Electron Energy-Loss Spectroscopy.- 1.1 Interaction of Fast Electrons with a Solid.- 1.2. The Electron Energy-Loss Spectrum.- 1.3. The Development of Experimental Techniques.- 1.4. Comparison of Analytical Methods.- 1.4.1. Ion-Beam Methods.- 1.4.2. Incident Photons.- 1.4.3. Electron-Beam Techniques.- 1.5. Further Reading.- 2. Instrumentation for Energy-Loss Spectroscopy.- 2.1. Energy-Analyzing and Energy-Selecting Systems.- 2.1.1. The Magnetic-Prism Spectrometer.- 2.1.2. Energy-Selecting Magnetic-Prism Devices.- 2.1.3. The Wien Filter.- 2.1.4. Cylindrical-Lens Analyzers.- 2.1.5. Retarding-Field Analyzers.- 2.1.6. Electron Monochromators.- 2.2. The Magnetic-Prism Spectrometer.- 2.2.1. First-Order Properties.- 2.2.2. Higher-Order Focusing.- 2.2.3. Design of an Aberration-Corrected Spectrometer.- 2.2.4. Practical Considerations.- 2.2.5. Alignment and Adjustment of the Spectrometer.- 2.3. The Use of Prespectrometer Lenses.- 2.3.1. Basic Principles.- 2.3.2. CTEM with Projector Lens On.- 2.3.3. CTEM with Projector Lens Off.- 2.3.4. Spectrometer-Specimen Coupling in a High-Resolution STEM.- 2.4. Recording the Energy-Loss Spectrum.- 2.4.1. Serial Acquisition.- 2.4.2. Electron Detectors for Serial Recording.- 2.4.3. Scanning the Energy-Loss Spectrum.- 2.4.4. Signal Processing and Storage.- 2.4.5. Noise Performance of a Serial Detector.- 2.4.6. Parallel-Recording Detectors.- 2.4.7. Direct Exposure of a Diode-Array Detector.- 2.4.8. Indirect Exposure of a Diode Array.- 2.4.9. Removal of Diode-Array Artifacts.- 2.5. Energy-Filtered Imaging.- 2.5.1. Elemental Mapping.- 2.5.2. Z-Contrast Imaging.- 3. Electron Scattering Theory.- 3.1. Elastic Scattering.- 3.1.1. General Formulas.- 3.1.2. Atomic Models.- 3.1.3. Diffraction Effects.- 3.1.4. Electron Channeling.- 3.1.5. Phonon Scattering.- 3.2. Inelastic Scattering.- 3.2.1. Atomic Models.- 3.2.2. Bethe Theory.- 3.2.3. Dielectric Formulation.- 3.2.4. Solid-State Effects.- 3.3. Excitation of Outer-Shell Electrons.- 3.3.1. Volume Plasmons.- 3.3.2. Single-Electron Excitation.- 3.3.3. Excitons.- 3.3.4. Radiation Losses.- 3.3.5. Surface Plasmons.- 3.3.6. Single, Plural, and Multiple Scattering.- 3.4. Inner-Shell Excitation.- 3.4.1. Generalized Oscillator Strength.- 3.4.2. Kinematics of Scattering.- 3.4.3. Ionization Cross Sections.- 3.5. The Spectral Background to Inner-Shell Edges.- 3.6. The Structure of Inner-Shell Edges.- 3.6.1. Basic Edge Shapes.- 3.6.2. Chemical Shifts in Threshold Energy.- 3.6.3. Near-Edge Fine Structure (ELNES).- 3.6.4. Extended Energy-Loss Fine Structure (EXELFS).- 4. Quantitative Analysis of the Energy-Loss Spectrum.- 4.1. Removal of Plural Scattering from the Low-Loss Region.- 4.1.1. Fourier-Log Deconvolution.- 4.1.2. Approximate Methods.- 4.1.3. Angular-Dependent Deconvolution.- 4.2. Kramers-Kronig Analysis.- 4.3. Removal of Plural Scattering from Inner-Shell Edges.- 4.3.1. Fourier-Log Deconvolution.- 4.3.2. Fourier-Ratio Method.- 4.3.3. Van Cittert'1. An Introduction to Electron Energy-Loss Spectroscopy.- 1.1 Interaction of Fast Electrons with a Solid.- 1.2. The Electron Energy-Loss Spectrum.- 1.3. The Development of Experimental Techniques.- 1.4. Comparison of Analytical Methods.- 1.4.1. Ion-Beam Methods.- 1.4.2. Incident Photons.- 1.4.3. Electron-Beam Techniques.- 1.5. Further Reading.- 2. Instrumentation for Energy-Loss Spectroscopy.- 2.1. Energy-Analyzing and Energy-Selecting Systems.- 2.1.1. The Magnetic-Prism Spectrometer.- 2.1.2. Energy-Selecting Magnetic-Prism Devices.- 2.1.3. The Wien Filter.- 2.1.4. Cylindrical-Lens Analyzers.- 2.1.5. Retarding-Field Analyzers.- 2.1.6. Electron Monochromators.- 2.2. The Magnetic-Prism Spectrometer.- 2.2.1. First-Order Properties.- 2.2.2. Higher-Order Focusing.- 2.2.3. Design of an Aberration-Corrected Spectrometer.- 2.2.4. Practical Considerations.- 2.2.5. Alignment and Adjustment of the Spectrometer.- 2.3. The Use of Prespectrometer Lenses.- 2.3.1. Basic Principles.- 2.3.2. CTEM with Projector Lens On.- 2.3.3. CTEM with Projector Lens Off.- 2.3.4. Spectrometer-Specimen Coupling in a High-Resolution STEM.- 2.4. Recording the Energy-Loss Spectrum.- 2.4.1. Serial Acquisition.- 2.4.2. Electron Detectors for Serial Recording.- 2.4.3. Scanning the Energy-Loss Spectrum.- 2.4.4. Signal Processing and Storage.- 2.4.5. Noise Performance of a Serial Detector.- 2.4.6. Parallel-Recording Detectors.- 2.4.7. Direct Exposure of a Diode-Array Detector.- 2.4.8. Indirect Exposure of a Diode Array.- 2.4.9. Removal of Diode-Array Artifacts.- 2.5. Energy-Filtered Imaging.- 2.5.1. Elemental Mapping.- 2.5.2. Z-Contrast Imaging.- 3. Electron Scattering Theory.- 3.1. Elastic Scattering.- 3.1.1. General Formulas.- 3.1.2. Atomic Models.- 3.1.3. Diffraction Effects.- 3.1.4. Electron Channeling.- 3.1.5. Phonon Scattering.- 3.2. Inelastic Scattering.- 3.2.1. Atomic Models.- 3.2.2. Bethe Theory.- 3.2.3. Dielectric Formulation.- 3.2.4. Solid-State Effects.- 3.3. Excitation of Outer-Shell Electrons.- 3.3.1. Volume Plasm
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Metadata
- Authors
- Egerton, R. F., & Newbury, D. E.
- Venue
- Physics Today
- Publisher
- AIP Publishing
- Published
- 1987-11-01
- Volume
- 40
- Issue
- 11
- Pages
- 94-95
- ISSN
- 0031-9228 (ISSN-L)
- 1945-0699
- OpenAlex
- W1988722541
- Cited by
- 3,415
- References
- 0
- FWCI
- 31.84
- Type
- journal article
- Language
- en
- Open access
- closed
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