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Broadband moth-eye antireflection coatings on silicon
Open accessAbstract
We report a bioinspired templating technique for fabricating broadband antireflection coatings that mimic antireflective moth eyes. Wafer-scale, subwavelength-structured nipple arrays are directly patterned on silicon using spin-coated silica colloidal monolayers as etching masks. The templated gratings exhibit excellent broadband antireflection properties and the normal-incidence specular reflection matches with the theoretical prediction using a rigorous coupled-wave analysis (RCWA) model. We further demonstrate that two common simulation methods, RCWA and thin-film multilayer models, generate almost identical prediction for the templated nipple arrays. This simple bottom-up technique is compatible with standard microfabrication, promising for reducing the manufacturing cost of crystalline silicon solar cells.
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Metadata
- Authors
- Sun, C.-H., Jiang, P., & Jiang, B.
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 2008-02-11
- Volume
- 92
- Issue
- 6
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W2048490541
- Cited by
- 498
- References
- 18
- FWCI
- 21.28
- Type
- journal article
- Language
- en
- Open access
- green
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.