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Atomic force microscope local oxidation nanolithography of graphene
Open accessAbstract
We demonstrate the local oxidation nanopatterning of graphene films by an atomic force microscope. The technique provides a method to form insulating trenches in graphene flakes and to fabricate nanodevices with sub-nanometer precision. We demonstrate fabrication of a 25-nm-wide nanoribbon and submicron size nanoring from a graphene flake. We also found that we can write either trenches or bumps on the graphene surface depending on the lithography conditions. We attribute the bumps to partial oxidation of the surface and incorporation of oxygen into the graphene lattice.
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Cites
Two-dimensional gas of massless Dirac fermions in graphene
Novoselov, K. S., Geim, A. K., Morozov, S. V., Jiang, D., Katsnelson, M. I., Grigorieva, I. V., Dubonos, S. V., & Firsov, A. A. (2005) · Nature · doi:10.1038/nature04233 · Cited by 21,611
Coulomb Oscillations and Hall Effect in Quasi-2D Graphite Quantum Dots
Bunch, J. S., Yaish, Y., Brink, M., Bolotin, K., & McEuen, P. L. (2005) · Nano Letters · doi:10.1021/nl048111+ · Cited by 312
Cited by
Graphene‐Based Materials: Synthesis, Characterization, Properties, and Applications
Huang, X., Yin, Z., Wu, S., Qi, X., He, Q., Zhang, Q., Yan, Q., Boey, F., & Zhang, H. (2011) · Small · doi:10.1002/smll.201002009 · Cited by 2,569
Brisebois, P. P., & Siaj, M. (2020) · Journal of Materials Chemistry C · doi:10.1039/c9tc03251g · Cited by 445
Rational Fabrication of Graphene Nanoribbons Using a Nanowire Etch Mask
Bai, J., Duan, X., & Huang, Y. (2009) · Nano Letters · doi:10.1021/nl900531n · Cited by 397
Rapid Sequencing of Individual DNA Molecules in Graphene Nanogaps
Postma, H. W. C. (2010) · Nano Letters · doi:10.1021/nl9029237 · Cited by 375
Metadata
- Authors
- Weng, L., Zhang, L., Chen, Y. P., & Rokhinson, L. P.
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 2008-09-01
- Volume
- 93
- Issue
- 9
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W1554537324
- Cited by
- 210
- References
- 2
- FWCI
- 8.93
- Type
- journal article
- Language
- en
- Open access
- green
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
