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Realization of a high mobility dual-gated graphene field-effect transistor with Al2O3 dielectric

Open access
Kim, Seyoung, Nah, Junghyo, Jo, Insun, Shahrjerdi, Davood, Colombo, Luigi, Yao, Zhen, Tutuc, Emanuel, Banerjee, Sanjay K.·2009·Applied Physics Letters

Abstract

We fabricate and characterize dual-gated graphene field-effect transistors using Al2O3 as top-gate dielectric. We use a thin Al film as a nucleation layer to enable the atomic layer deposition of Al2O3. Our devices show mobility values of over 8000 cm2/V s at room temperature, a finding which indicates that the top-gate stack does not significantly increase the carrier scattering and consequently degrade the device characteristics. We propose a device model to fit the experimental data using a single mobility value.

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Crossref · 10.1063/1.3077021

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Metadata

Authors
Kim, S., Nah, J., Jo, I., Shahrjerdi, D., Colombo, L., Yao, Z., Tutuc, E., & Banerjee, S. K.
Venue
Applied Physics Letters
Published
2009-02-09
Volume
94
Issue
6
ISSN
  • 0003-6951 (ISSN-L)
  • 1077-3118
OpenAlex
W1927677023
Cited by
1,012
References
1
FWCI
35.73
Type
journal article
Language
en
Open access
green

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CoChat. (2026). Citation check: Realization of a high mobility dual-gated graphene field-effect transistor with Al2O3 dielectric. https://app.cochat.ai/papers/10.1063/1.3077021
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Kim, S., Nah, J., Jo, I., Shahrjerdi, D., Colombo, L., Yao, Z., Tutuc, E., & Banerjee, S. K. (2009). Realization of a high mobility dual-gated graphene field-effect transistor with Al2O3 dielectric. Applied Physics Letters. https://doi.org/10.1063/1.3077021

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Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.