The DOI matches its Crossref record.
Metal deposition from a supported metal film using an excimer laser
Abstract
A method for the direct writing of metal features from a metal film supported on an optically transparent substrate using a single pulse from a high-energy excimer laser (193 nm) is presented. The technique eliminates the need for gas-phase precursors in many cases and is an inherently clean process. Results of copper depositions onto silicon substrates are shown to exemplify the technique and a mechanism for the process is proposed.
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Citations
Cited by
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Murphy, S. V., & Atala, A. (2014) · Nature Biotechnology · doi:10.1038/nbt.2958 · Cited by 7,034
Progress in 3D bioprinting technology for tissue/organ regenerative engineering
Matai, I., Kaur, G., Seyedsalehi, A., McClinton, A., & Laurencin, C. T. (2020) · Biomaterials · doi:10.1016/j.biomaterials.2019.119536 · Cited by 1,156
Bioprinting for vascular and vascularized tissue biofabrication
Datta, P., Ayan, B., & Ozbolat, I. T. (2017) · Acta Biomaterialia · doi:10.1016/j.actbio.2017.01.035 · Cited by 431
Metadata
- Authors
- Bohandy, J., Kim, B. F., & Adrian, F. J.
- Venue
- Journal of Applied Physics
- Publisher
- AIP Publishing
- Published
- 1986-08-15
- Volume
- 60
- Issue
- 4
- Pages
- 1538-1539
- ISSN
- 0021-8979 (ISSN-L)
- 1089-7550
- OpenAlex
- W2090467568
- Cited by
- 686
- References
- 0
- FWCI
- 4.38
- Type
- journal article
- Language
- en
- Open access
- closed
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How to cite
Cite CoChat for the checks on this page, and the paper for its own findings.
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- CoChat. (2026). Citation check: Metal deposition from a supported metal film using an excimer laser. https://app.cochat.ai/papers/10.1063/1.337287
- The paper
- Bohandy, J., Kim, B. F., & Adrian, F. J. (1986). Metal deposition from a supported metal film using an excimer laser. Journal of Applied Physics. https://doi.org/10.1063/1.337287
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
