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Cited by 159

The DOI matches its Crossref record; 1 of the 1 references it cites were found in a registry or an index.

High quality factor single-crystal diamond mechanical resonators

Open access
Ovartchaiyapong, P., Pascal, L. M. A., Myers, B. A., Lauria, P., Bleszynski Jayich, A. C.·2012·Applied Physics Letters

Abstract

Single-crystal diamond is a promising material for microelectromechanical systems (MEMs) because of its low mechanical loss, compatibility with extreme environments, and built-in interface to high-quality spin centers. But its use has been limited by challenges in processing and growth. We demonstrate a wafer bonding-based technique to form diamond on insulator, from which we make single-crystal diamond micromechanical resonators with mechanical quality factors as high as 338 000 at room temperature. Variable temperature measurements down to 10 K reveal a nonmonotonic dependence of quality factor on temperature. These resonators enable integration of single-crystal diamond into MEMs technology for classical and quantum applications.

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Metadata

Authors
Ovartchaiyapong, P., Pascal, L. M. A., Myers, B. A., Lauria, P., & Bleszynski Jayich, A. C.
Venue
Applied Physics Letters
Published
2012-10-15
Volume
101
Issue
16
ISSN
  • 0003-6951 (ISSN-L)
  • 1077-3118
OpenAlex
W2129140432
Cited by
159
References
1
FWCI
10.38
Type
journal article
Language
en
Open access
green

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CoChat. (2026). Citation check: High quality factor single-crystal diamond mechanical resonators. https://app.cochat.ai/papers/10.1063/1.4760274
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Ovartchaiyapong, P., Pascal, L. M. A., Myers, B. A., Lauria, P., & Bleszynski Jayich, A. C. (2012). High quality factor single-crystal diamond mechanical resonators. Applied Physics Letters. https://doi.org/10.1063/1.4760274

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