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High quality factor single-crystal diamond mechanical resonators
Open accessAbstract
Single-crystal diamond is a promising material for microelectromechanical systems (MEMs) because of its low mechanical loss, compatibility with extreme environments, and built-in interface to high-quality spin centers. But its use has been limited by challenges in processing and growth. We demonstrate a wafer bonding-based technique to form diamond on insulator, from which we make single-crystal diamond micromechanical resonators with mechanical quality factors as high as 338 000 at room temperature. Variable temperature measurements down to 10 K reveal a nonmonotonic dependence of quality factor on temperature. These resonators enable integration of single-crystal diamond into MEMs technology for classical and quantum applications.
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Cites
Laser cooling of a nanomechanical oscillator into its quantum ground state
Chan, J., Alegre, T. P. M., Safavi-Naeini, A. H., Hill, J. T., Krause, A., Gröblacher, S., Aspelmeyer, M., & Painter, O. (2011) · Nature · doi:10.1038/nature10461 · Cited by 2,311
Cited by
Aharonovich, I., & Neu, E. (2014) · Advanced Optical Materials · doi:10.1002/adom.201400189 · Cited by 359
Dissipation in nanoelectromechanical systems
Imboden, M., & Mohanty, P. (2014) · Physics Reports · doi:10.1016/j.physrep.2013.09.003 · Cited by 273
Superconducting single-photon detectors integrated with diamond nanophotonic circuits
Rath, P., Kahl, O., Ferrari, S., Sproll, F., Lewes-Malandrakis, G., Brink, D., Ilin, K., Siegel, M., Nebel, C., & Pernice, W. (2015) · Light: Science & Applications · doi:10.1038/lsa.2015.111 · Cited by 72
Metadata
- Authors
- Ovartchaiyapong, P., Pascal, L. M. A., Myers, B. A., Lauria, P., & Bleszynski Jayich, A. C.
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 2012-10-15
- Volume
- 101
- Issue
- 16
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W2129140432
- Cited by
- 159
- References
- 1
- FWCI
- 10.38
- Type
- journal article
- Language
- en
- Open access
- green
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- Ovartchaiyapong, P., Pascal, L. M. A., Myers, B. A., Lauria, P., & Bleszynski Jayich, A. C. (2012). High quality factor single-crystal diamond mechanical resonators. Applied Physics Letters. https://doi.org/10.1063/1.4760274
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