High-throughput heterodyne thermoreflectance: Application to thermal conductivity measurements of a Fe–Si–Ge thin film alloy library
Open accessAbstract
A High-Throughput Time-Domain ThermoReflectance (HT-TDTR) technique was developed to perform fast thermal conductivity measurements with minimum user actions required. This new setup is based on a heterodyne picosecond thermoreflectance system. The use of two different laser oscillators has been proven to reduce the acquisition time by two orders of magnitude and avoid the experimental artefacts usually induced by moving the elements present in TDTR systems. An amplitude modulation associated to a lock-in detection scheme is included to maintain a high sensitivity to thermal properties. We demonstrate the capabilities of the HT-TDTR setup to perform high-throughput thermal analysis by mapping thermal conductivity and interface resistances of a ternary thin film silicide library FexSiyGe100−x−y (20<x,y<80) deposited by wedge-type multi-layer method on a 100 mm diameter sapphire wafer offering more than 300 analysis areas of different ternary alloy compositions.
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A small beat frequency of Δf = 1 Hz is usually needed so that a time constant of 30 μs can be chosen for the lock-in amplifier to avoid signal aliasing.
“A small beat frequency of Δ f =1 Hz is usually needed so that a time constant of 30 μ s can be chosen for the lock-in amplifier to avoid signal aliasing. 173”
From Tutorial: Time-domain thermoreflectance (TDTR) for thermal property characterization of bulk and thin film materials (2018) · cites this paper as [173]
The High-throughput thermoreflectance setup section (p. 3) reports a 1 Hz oscillator frequency shift and a lock-in time constant rendered in our copy as “30 s” (the unit may have been lost in extraction). It says the time constant was set for acquisition-speed purposes, not that 1 Hz is usually needed to permit a 30 μs setting or to avoid signal aliasing. (LLM, conf=0.84)
Experimental — accuracy not yet measuredASOPS-TDTR has approximately 10 times faster data acquisition speed and is free of artefacts associated with the moving delay stage.
“This ASOPS-TDTR technique, with its ~10 times faster data acquisition speed and free of artefacts associated with the moving delay stage, has been successfully employed in several studies”
From Tutorial: Time-domain thermoreflectance (TDTR) for thermal property characterization of bulk and thin film materials (2018) · cites this paper as [173]
The Introduction (p. 2) says asynchronous optical sampling replaces the mechanical delay line and suppresses beam-defocusing and overlap artefacts. The high-throughput setup section reports faster acquisition, but its comparison gives about 80 s versus 1 s per acquisition (p. 4), and a 45-fold reduction in total measurement time (p. 5), not an approximately tenfold gain. (LLM, conf=0.88)
Experimental — accuracy not yet measuredHT-TDTR combines ASOPS with high-frequency modulation of the pump beam, enabling fast and accurate measurements of thermal properties.
“Dilhaire and co-workers 172, 173 proposed a high-throughput time-domain thermoreflectance (HT-TDTR) technique that combines ASOPS with high-frequency modulation of the pump beam, enabling fast and accurate measurements of thermal properties.”
From Tutorial: Time-domain thermoreflectance (TDTR) for thermal property characterization of bulk and thin film materials (2018) · cites this paper as [173]
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References 21 · Cited by 11
Research works printed but not linked: 3
- 2 B. Vermeersch, A. M. S. Mohammed, G. Pernot, Y. R. Koh, and A. Shakouri, Phys. Rev. B 91 , 085203 (2015); e-print arXiv:1406.7342. · arXiv
- 9 J. Chen, W.-K. Chen, J. Tang, and P. M. Rentzepis, Proc. Natl. Acad. Sci. U. S. A. 108 , 18887 (2011).
- 18 Y. Niwa, Y. Todaka, T. Masuda, T. Kawai, and M. Umemoto, Mater. Trans. 50 , 1725 (2009).
- Authors
- d’Acremont, Q., Pernot, G., Rampnoux, J.-M., Furlan, A., Lacroix, D., Ludwig, A., & Dilhaire, S.
- Affiliations
- Laboratoire Ondes et Matière d’Aquitaine (LOMA), UMR 5798, CNRS-Université de Bordeaux 1 , 33400 Talence, France
- Centre National de la Recherche Scientifique (FR)
- Ruhr University Bochum (DE)
- Venue
- Review of Scientific Instruments
- Publisher
- AIP Publishing
- Published
- 2017-07-01
- Volume
- 88
- Issue
- 7
- Pages
- 074902-074902
- ISSN
- 0034-6748 (ISSN-L)
- 1089-7623
- OpenAlex
- W2736118009
- Cited by
- 11
- References
- 21
- Citations by year
- 2026: 1 · 2025: 1 · 2024: 2 · 2022: 1 · 2021: 1 · 2020: 3 · 2019: 1 · 2018: 1
- FWCI
- 0.58
- Type
- journal article
- Language
- en
- Open access
- green
- hal.science
- Licence
- cc-by-sa
- Locations
- Review of Scientific Instruments (publishedVersion)
- PubMed (publishedVersion)
- HAL (submittedVersion, cc-by-sa)
- Oskar-Bordeaux (Universite de Bordeaux) (submittedVersion, cc-by-sa)
- Funders
- Agence Nationale de la Recherche
- Topics
- Physical Sciences › Materials Science › Materials Chemistry › Thermal properties of materials
- Physical Sciences › Engineering › Mechanics of Materials › Thermography and Photoacoustic Techniques
- Physical Sciences › Engineering › Mechanics of Materials › Metal and Thin Film Mechanics
- Keywords
- time-domain thermoreflectance, thermal conductivity, interfacial resistance, amplitude modulation, phase-sensitive detection, thin film libraries
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