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Analysis and mitigation of interface losses in trenched superconducting coplanar waveguide resonators
Open accessAbstract
Improving the performance of superconducting qubits and resonators generally results from a combination of materials and fabrication process improvements and design modifications that reduce device sensitivity to residual losses. One instance of this approach is to use trenching into the device substrate in combination with superconductors and dielectrics with low intrinsic losses to improve quality factors and coherence times. Here, we demonstrate titanium nitride coplanar waveguide resonators with mean quality factors exceeding two million and controlled trenching reaching 2.2 μm in the silicon substrate. Additionally, we measure sets of resonators with a range of sizes and trench depths and compare these results with finite-element simulations to demonstrate quantitative agreement with a model of interface dielectric loss. We then apply this analysis to determine the extent to which trenching can improve resonator performance.
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Cites
Decoherence in Josephson Qubits from Dielectric Loss
Martinis, J. M., Cooper, K. B., McDermott, R., Steffen, M., Ansmann, M., Osborn, K. D., Cicak, K., Oh, S., Pappas, D. P., Simmonds, R. W., et al. (2005) · Physical Review Letters · doi:10.1103/physrevlett.95.210503 · Cited by 838
Quantum memory with millisecond coherence in circuit QED
Reagor, M., Pfaff, W., Axline, C., Heeres, R. W., Ofek, N., Sliwa, K., Holland, E., Wang, C., Blumoff, J., Chou, K., et al. (2016) · Physical Review B · doi:10.1103/physrevb.94.014506 · Cited by 376
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Materials challenges and opportunities for quantum computing hardware
de Leon, N. P., Itoh, K. M., Kim, D., Mehta, K. K., Northup, T. E., Paik, H., Palmer, B. S., Samarth, N., Sangtawesin, S., & Steuerman, D. W. (2021) · Science · doi:10.1126/science.abb2823 · Cited by 710
Self-citationTowards understanding two-level-systems in amorphous solids: insights from quantum circuits
Müller, C., Cole, J. H., & Lisenfeld, J. (2019) · Reports on Progress in Physics · doi:10.1088/1361-6633/ab3a7e · Cited by 508
Quantum information processing and quantum optics with circuit quantum electrodynamics
Blais, A., Girvin, S. M., & Oliver, W. D. (2020) · Nature Physics · doi:10.1038/s41567-020-0806-z · Cited by 420
Self-citationCorrelating Decoherence in Transmon Qubits: Low Frequency Noise by Single Fluctuators
Schlör, S., Lisenfeld, J., Müller, C., Bilmes, A., Schneider, A., Pappas, D. P., Ustinov, A. V., & Weides, M. (2019) · Physical Review Letters · doi:10.1103/physrevlett.123.190502 · Cited by 209
Reducing the impact of radioactivity on quantum circuits in a deep-underground facility
Cardani, L., Valenti, F., Casali, N., Catelani, G., Charpentier, T., Clemenza, M., Colantoni, I., Cruciani, A., D’Imperio, G., Gironi, L., et al. (2021) · Nature Communications · doi:10.1038/s41467-021-23032-z · Cited by 163
Metadata
- Authors
- Calusine, G., Melville, A., Woods, W., Das, R., Stull, C., Bolkhovsky, V., Braje, D., Hover, D., Kim, D. K., Miloshi, X., Rosenberg, D., Sevi, A., Yoder, J. L., Dauler, E., & Oliver, W. D.
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 2018-02-05
- Volume
- 112
- Issue
- 6
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W2758620562
- Cited by
- 167
- References
- 2
- FWCI
- 9.48
- Type
- journal article
- Language
- en
- Open access
- hybrid
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- Calusine, G., Melville, A., Woods, W., Das, R., Stull, C., Bolkhovsky, V., Braje, D., Hover, D., Kim, D. K., Miloshi, X., Rosenberg, D., Sevi, A., Yoder, J. L., Dauler, E., & Oliver, W. D. (2018). Analysis and mitigation of interface losses in trenched superconducting coplanar waveguide resonators. Applied Physics Letters. https://doi.org/10.1063/1.5006888
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