The DOI matches its Crossref record; 3 of the 3 references it cites were found in a registry or an index.
Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks
Open accessAbstract
High-resolution, conformable phase masks provide a means to fabricate, in an experimentally simple manner, classes of 3D nanostructures that are technologically important but difficult to generate in other ways. In this approach, light passing through a phase mask that has features of relief comparable in dimension to the wavelength generates a 3D distribution of intensity that exposes a photopolymer film throughout its thickness. Developing this polymer yields a structure in the geometry of the intensity distribution, with feature sizes as small as 50 nm. Rigorous coupled-wave analysis reveals the fundamental aspects of the optics associated with this method; a broad-range 3D nanostructures patterned with it demonstrates its technical capabilities. A nanoporous filter element built inside a microfluidic channel represents one example of the many types of functional devices that can be constructed.
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Citations
Cites
Finer features for functional microdevices
Kawata, S., Sun, H.-B., Tanaka, T., & Takada, K. (2001) · Nature · doi:10.1038/35089130 · Cited by 2,871
Discretizing light behaviour in linear and nonlinear waveguide lattices
Christodoulides, D. N., Lederer, F., & Silberberg, Y. (2003) · Nature · doi:10.1038/nature01936 · Cited by 1,692
Complex micromachines produced and driven by light
Galajda, P., & Ormos, P. (2001) · Applied Physics Letters · doi:10.1063/1.1339258 · Cited by 565
Cited by
Micro- and Nanopatterning Techniques for Organic Electronic and Optoelectronic Systems
Menard, E., Meitl, M. A., Sun, Y., Park, J.-U., Shir, D. J.-L., Nam, Y.-S., Jeon, S., & Rogers, J. A. (2007) · Chemical Reviews · doi:10.1021/cr050139y · Cited by 658
Self-citationRecent progress in multiphoton microfabrication
Maruo, S., & Fourkas, J. T. (2008) · Laser & Photonics Reviews · doi:10.1002/lpor.200710039 · Cited by 390
Three-dimensional nanonetworks for giant stretchability in dielectrics and conductors
Park, J., Wang, S., Li, M., Ahn, C., Hyun, J. K., Kim, D. S., Kim, D. K., Rogers, J. A., Huang, Y., & Jeon, S. (2012) · Nature Communications · doi:10.1038/ncomms1929 · Cited by 334
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Metadata
- Authors
- Jeon, S., Park, J.-U., Cirelli, R., Yang, S., Heitzman, C. E., Braun, P. V., Kenis, P. J. A., & Rogers, J. A.
- Venue
- Proceedings of the National Academy of Sciences
- Published
- 2004-08-16
- Volume
- 101
- Issue
- 34
- Pages
- 12428-12433
- ISSN
- 0027-8424 (ISSN-L)
- 1091-6490
- OpenAlex
- W2138498694
- Cited by
- 303
- References
- 3
- FWCI
- 18.96
- Type
- journal article
- Language
- en
- Open access
- green
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- Jeon, S., Park, J.-U., Cirelli, R., Yang, S., Heitzman, C. E., Braun, P. V., Kenis, P. J. A., & Rogers, J. A. (2004). Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks. Proceedings of the National Academy of Sciences. https://doi.org/10.1073/pnas.0403048101
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