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Cited by 612Metamaterials and Metasurfaces ApplicationsOptical Coatings and GratingsAdvanced Antenna and Metasurface Technologies

Broadband high-efficiency dielectric metasurfaces for the visible spectrum

Open access
Devlin, Robert C., Khorasaninejad, Mohammadreza, Chen, Wei Ting, Oh, Jaewon, Capasso, Federico·2016·Proceedings of the National Academy of Sciences
DOI 10.1073/pnas.1611740113PMC PMC5035844
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Abstract

Significance: Metasurfaces are optical elements that can mimic and expand on the functionality of refractive optics with a comparatively thin and planar profile. Transmissive metasurfaces suffer from high optical loss at visible wavelengths because of currently used materials and fabrication techniques. This work introduces metasurfaces that operate across the visible spectrum with high efficiencies. As the basis of our metasurfaces, we used a common material, titanium dioxide, and a fabrication method based an atomic layer deposition that creates highly anisotropic nanostructures. The results presented here provide an important advance for realizing optical components at visible wavelengths—e.g., lenses, holograms, and phase shifters—with orders of magnitude reduction in thickness compared with traditional refractive optics.

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  • Patterning, thin-film etching, lift-off, and additive manufacturing all introduce inevitable geometric deviations between experimental devices and ideal, theoretical designs.

    “Patterning [25–27], thin-film etching, lift-off, and additive manufacturing [28] all introduce inevitable geometric deviations between experimental devices and ideal, theoretical designs.”

    From Robust design of topology-optimized metasurfaces (2019) · cites this paper as [28]

    The Figure 3 caption (page unavailable in our copy) reports fabricated nanofins within ±10 nm of their designed dimensions, and the fabrication section says dry etching can increase sidewall roughness. These passages support the possibility of geometric deviations, but not the claim that every listed process inevitably introduces them; the paper does not address additive manufacturing. (LLM, conf=0.83)

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Cites

Flagged first, then by citations

Research works printed but not linked: 22

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Cited by

Sorted by citations

Authors
Devlin, R. C., Khorasaninejad, M., Chen, W. T., Oh, J., & Capasso, F.
Affiliations
Harvard University (US)
ORCID
Venue
Proceedings of the National Academy of Sciences
Publisher
National Academy of Sciences
Published
2016-09-06
Volume
113
Issue
38
Pages
10473-10478
ISSN
  • 0027-8424 (ISSN-L)
  • 1091-6490
DOI
10.1073/pnas.1611740113
PMC
PMC5035844
OpenAlex
W2293149760
Cited by
612
References
4
Citations by year
2026: 53 · 2025: 58 · 2024: 65 · 2023: 45 · 2022: 52 · 2021: 59 · 2020: 71 · 2019: 79 · 2018: 69 · 2017: 55 · 2016: 6
FWCI
21.87
Type
journal article
Language
en
Open access
Licence
www.pnas.org/site/misc/userlicense.xhtml (vor)
Locations
  • Proceedings of the National Academy of Sciences (publishedVersion)
  • PubMed Central (publishedVersion)
  • PubMed (publishedVersion)
  • arXiv (Cornell University) (submittedVersion)
  • arXiv (Cornell University)
Funders
  • Charles Stark Draper Laboratory (SC001-0000000959)
  • DOD | Air Force Office of Scientific Research (FA9550-14-1-0389)
  • Ministry of Science and Technology, Taiwan (104-2917-I-564-058)
  • National Science Foundation (ECS-0335765)
Topics
  • Physical Sciences › Materials Science › Electronic, Optical and Magnetic Materials › Metamaterials and Metasurfaces Applications
  • Physical Sciences › Materials Science › Surfaces, Coatings and Films › Optical Coatings and Gratings
  • Physical Sciences › Engineering › Aerospace Engineering › Advanced Antenna and Metasurface Technologies
Keywords
dielectric metasurfaces, visible spectrum, holograms, amorphous TiO2, atomic layer deposition, anisotropic nanostructures, subwavelength nanostructures, metalenses, axicon, high numerical aperture lenses, color holograms

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