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Cited by 759

The DOI matches its Crossref record; 25 of the 25 references it cites were found in a registry or an index.

DESIGN CONSIDERATIONS FOR MEMS-SCALE PIEZOELECTRIC MECHANICAL VIBRATION ENERGY HARVESTERS

DUTOIT, NOËL E., WARDLE, BRIAN L., KIM, SANG-GOOK·2005·Integrated Ferroelectrics

Abstract

Design considerations for piezoelectric-based energy harvesters for MEMS-scale sensors are presented, including a review of past work. Harvested ambient vibration energy can satisfy power needs of advanced MEMS-scale autonomous sensors for numerous applications, e.g., structural health monitoring. Coupled 1-D and modal (beam structure) electromechanical models are presented to predict performance, especially power, from measured low-level ambient vibration sources. Models are validated by comparison to prior published results and tests of a MEMS-scale device. A non-optimized prototype low-level ambient MEMS harvester producing 30 μW/cm3 is designed and modeled. A MEMS fabrication process for the prototype device is presented based on past work.

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Metadata

Authors
DUTOIT, N. E., WARDLE, B. L., & KIM, S.-G.
Venue
Integrated Ferroelectrics
Published
2005-07
Volume
71
Issue
1
Pages
121-160
ISSN
  • 1026-7530 (ISSN-L)
  • 1058-4587
  • 1607-8489
OpenAlex
W2030738616
Cited by
759
References
25
FWCI
41.03
Type
journal article
Language
en
Open access
closed

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CoChat. (2026). Citation check: DESIGN CONSIDERATIONS FOR MEMS-SCALE PIEZOELECTRIC MECHANICAL VIBRATION ENERGY HARVESTERS. https://app.cochat.ai/papers/10.1080/10584580590964574
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DUTOIT, N. E., WARDLE, B. L., & KIM, S.-G. (2005). DESIGN CONSIDERATIONS FOR MEMS-SCALE PIEZOELECTRIC MECHANICAL VIBRATION ENERGY HARVESTERS. Integrated Ferroelectrics. https://doi.org/10.1080/10584580590964574

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