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Focused ion beam applications to solid state devices
Open accessAbstract
The current state of focused ion beam (FIB) applications in relation to solid state devices is reviewed, and recent use of FIB technology for lithography, etching, deposition, and doping are described. Etching and deposition have become essential processes for failure analysis and for mask repair in silicon ULSL production. Furthermore, the FIB doping technique has been used to fabricate quantum effect devices.
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Cited by
One‐Dimensional Nanostructures: Synthesis, Characterization, and Applications
Xia, Y., Yang, P., Sun, Y., Wu, Y., Mayers, B., Gates, B., Yin, Y., Kim, F., & Yan, H. (2003) · Advanced Materials · doi:10.1002/adma.200390087 · Cited by 8,559
Unconventional Methods for Fabricating and Patterning Nanostructures
Xia, Y., Rogers, J. A., Paul, K. E., & Whitesides, G. M. (1999) · Chemical Reviews · doi:10.1021/cr980002q · Cited by 1,538
One‐Dimensional Composite Nanomaterials: Synthesis by Electrospinning and Their Applications
Lu, X., Wang, C., & Wei, Y. (2009) · Small · doi:10.1002/smll.200900445 · Cited by 874
Metadata
- Authors
- Matsui, S., & Ochiai, Y.
- Venue
- Nanotechnology
- Publisher
- IOP Publishing
- Published
- 1996-09-01
- Volume
- 7
- Issue
- 3
- Pages
- 247-258
- ISSN
- 0957-4484 (ISSN-L)
- 1361-6528
- OpenAlex
- W1972155666
- Cited by
- 169
- References
- 0
- FWCI
- 1.54
- Type
- journal article
- Language
- en
- Open access
- bronze
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- CoChat. (2026). Citation check: Focused ion beam applications to solid state devices. https://app.cochat.ai/papers/10.1088/0957-4484/7/3/013
- The paper
- Matsui, S., & Ochiai, Y. (1996). Focused ion beam applications to solid state devices. Nanotechnology. https://doi.org/10.1088/0957-4484/7/3/013
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
