The DOI matches its Crossref record.
The mechanical properties of the rubber elastic polymer polydimethylsiloxane for sensor applications
Open accessAbstract
Polydimethylsiloxane (PDMS) is a commercially available physically and chemically stable silicone rubber. It has a unique flexibility with a shear elastic modulus due to one of the lowest glass transition temperatures of any polymer . Further properties of PDMS are a low change in the shear elastic modulus versus temperature , virtually no change in G versus frequency and a high compressibility. Because of its clean room processability, its low curing temperature, its high flexibility, the possibility to change its functional groups and the very low drift of its properties with time and temperature, PDMS is very well suited for micromachined mechanical and chemical sensors, such as accelerometers (as the spring material) and ISFETs (as the ion selective membrane). It can also be used as an adhesive in wafer bonding, as a cover material in tactile sensors and as the mechanical decoupling zone in sensor packagings.
Overview
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Integrity signals
Registry
Cites
Statistics
Verification
Claims the paper makes
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Self-check
Percentages, sums and reported differences re-computed from the paper’s own numbers.
The self-check needs the paper’s full text.
Citations
Cited by
Reversibly Deformable and Mechanically Tunable Fluidic Antennas
So, J., Thelen, J., Qusba, A., Hayes, G. J., Lazzi, G., & Dickey, M. D. (2009) · Advanced Functional Materials · doi:10.1002/adfm.200900604 · Cited by 555
Review of Flexible Temperature Sensing Networks for Wearable Physiological Monitoring
Li, Q., Zhang, L., Tao, X., & Ding, X. (2017) · Advanced Healthcare Materials · doi:10.1002/adhm.201601371 · Cited by 354
Wearable and flexible sensors for user-interactive health-monitoring devices
Ha, M., Lim, S., & Ko, H. (2018) · Journal of Materials Chemistry B · doi:10.1039/c8tb01063c · Cited by 352
Zhao, S., Feron, P. H. M., Deng, L., Favre, E., Chabanon, E., Yan, S., Hou, J., Chen, V., & Qi, H. (2016) · Journal of Membrane Science · doi:10.1016/j.memsci.2016.03.051 · Cited by 328
High strain rate deformation of layered nanocomposites
Lee, J.-H., Veysset, D., Singer, J. P., Retsch, M., Saini, G., Pezeril, T., Nelson, K. A., & Thomas, E. L. (2012) · Nature Communications · doi:10.1038/ncomms2166 · Cited by 239
Metadata
- Authors
- Lötters, J. C., Olthuis, W., Veltink, P. H., & Bergveld, P.
- Venue
- Journal of Micromechanics and Microengineering
- Publisher
- IOP Publishing
- Published
- 1997-09-01
- Volume
- 7
- Issue
- 3
- Pages
- 145-147
- ISSN
- 0960-1317 (ISSN-L)
- 1361-6439
- OpenAlex
- W2161065218
- Cited by
- 827
- References
- 0
- FWCI
- 2.51
- Type
- journal article
- Language
- en
- Open access
- green
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review
How to cite
Cite CoChat for the checks on this page, and the paper for its own findings.
- This page
- CoChat. (2026). Citation check: The mechanical properties of the rubber elastic polymer polydimethylsiloxane for sensor applications. https://app.cochat.ai/papers/10.1088/0960-1317/7/3/017
- The paper
- Lötters, J. C., Olthuis, W., Veltink, P. H., & Bergveld, P. (1997). The mechanical properties of the rubber elastic polymer polydimethylsiloxane for sensor applications. Journal of Micromechanics and Microengineering. https://doi.org/10.1088/0960-1317/7/3/017
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
