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Microfabrication of PPy microactuators and other conjugated polymer devices

Open access
Smela, Elisabeth·1999·Journal of Micromechanics and Microengineering

Abstract

Conjugated polymers have a number of interesting properties that can be exploited in microfabricated sensors and actuators. For example, polypyrrole is a conjugated polymer that can change volume to deliver significant stresses and strains. These materials can be patterned using conventional microfabrication techniques. The procedures for doing this are described in this paper, focusing on the microfabrication of polypyrrole microactuators. In addition, other methods for the deposition and patterning of conjugated polymers are reviewed. A special technique for releasing actuators, differential adhesion, is also detailed.

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Metadata

Authors
Smela, E.
Venue
Journal of Micromechanics and Microengineering
Published
1999-01-01
Volume
9
Issue
1
Pages
1-18
ISSN
  • 0960-1317 (ISSN-L)
  • 1361-6439
OpenAlex
W2048868790
Cited by
318
References
0
FWCI
8.45
Type
journal article
Language
en
Open access
bronze

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CoChat. (2026). Citation check: Microfabrication of PPy microactuators and other conjugated polymer devices. https://app.cochat.ai/papers/10.1088/0960-1317/9/1/001
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Smela, E. (1999). Microfabrication of PPy microactuators and other conjugated polymer devices. Journal of Micromechanics and Microengineering. https://doi.org/10.1088/0960-1317/9/1/001

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Bibliographic data: Semantic Scholar, OpenAlex, Crossref.

Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).

Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.