The DOI matches its Crossref record; 31 of the 31 references it cites were found in a registry or an index.
Review of modeling electrostatically actuated microelectromechanical systems
Abstract
A wide range of microelectromechanical systems (MEMSs) and devices are actuated using electrostatic forces. Multiphysics modeling is required, since coupling among different fields such as solid and fluid mechanics, thermomechanics and electromagnetism is involved. This work presents an overview of models for electrostatically actuated MEMSs. Three-dimensional nonlinear formulations for the coupled electromechanical fluid–structure interaction problem are outlined. Simplified reduced-order models are illustrated along with assumptions that define their range of applicability. Theoretical, numerical and experimental works are classified according to the mechanical model used in the analysis.
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Fundamentals of Fluid Film Lubrication
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Microelectromechanical systems (MEMS): fabrication, design and applications
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A reduced-order model for electrically actuated microbeam-based MEMS
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Cited by
Buckling-induced smart applications: recent advances and trends
Hu, N., & Burgueño, R. (2015) · Smart Materials and Structures · doi:10.1088/0964-1726/24/6/063001 · Cited by 351
High Force Density Textile Electrostatic Clutch
Hinchet, R., & Shea, H. (2020) · Advanced Materials Technologies · doi:10.1002/admt.201900895 · Cited by 132
Metadata
- Authors
- Batra, R. C., Porfiri, M., & Spinello, D.
- Venue
- Smart Materials and Structures
- Publisher
- IOP Publishing
- Published
- 2007-10-08
- Volume
- 16
- Issue
- 6
- Pages
- R23-R31
- ISSN
- 0964-1726 (ISSN-L)
- 1361-665X
- OpenAlex
- W2114477930
- Cited by
- 287
- References
- 31
- FWCI
- 16.07
- Type
- journal article
- Language
- en
- Open access
- closed
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